Patents by Inventor Chris Maher

Chris Maher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11114324
    Abstract: Systems and methods for detecting defect candidates on a specimen are provided. One method includes, after scanning of at least a majority of a specimen is completed, applying one or more segmentation methods to at least a substantial portion of output generated during the scanning thereby generating two or more segments of the output. The method also includes separately detecting outliers in the two or more segments of the output. In addition, the method includes detecting defect candidates on the specimen by applying one or more predetermined criteria to results of the separately detecting to thereby designate a portion of the detected outliers as the defect candidates.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: September 7, 2021
    Assignee: KLA Corp.
    Inventors: Martin Plihal, Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani, Chris Maher
  • Patent number: 10832396
    Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: November 10, 2020
    Assignee: KLA-Tencor Corp.
    Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
  • Publication number: 20200328104
    Abstract: Systems and methods for detecting defect candidates on a specimen are provided. One method includes, after scanning of at least a majority of a specimen is completed, applying one or more segmentation methods to at least a substantial portion of output generated during the scanning thereby generating two or more segments of the output. The method also includes separately detecting outliers in the two or more segments of the output. In addition, the method includes detecting defect candidates on the specimen by applying one or more predetermined criteria to results of the separately detecting to thereby designate a portion of the detected outliers as the defect candidates.
    Type: Application
    Filed: October 15, 2019
    Publication date: October 15, 2020
    Inventors: Martin Plihal, Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani, Chris Maher
  • Publication number: 20200126212
    Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.
    Type: Application
    Filed: March 25, 2019
    Publication date: April 23, 2020
    Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
  • Patent number: 10604433
    Abstract: A method of treating a mixture of microorganisms containing phosphorus and magnesium, by first inducing the mixture microorganisms to release phosphorus and magnesium. Next an emancipation or elutriation is performed. Phosphorus and magnesium-rich liquid is then tapped off as the mixture is thickened, to produce phosphorus and magnesium-rich liquid and phosphorus and magnesium-reduced treated mixture. This treated mixture is placed in an anaerobic digester where ammonia is formed but combines very little with phosphorus or magnesium as these elements have been reduced in concentration. Then the high-ammonia mixture is dewatered, to produce an ammonia-rich liquid, which is combined with the phosphorus and magnesium-rich liquid. In one preferred example a useable struvite product is harvested from this combination. Additionally, the production of nuisance struvite in the anaerobic digester is reduced, in comparison with prior art waste treatment methods.
    Type: Grant
    Filed: October 24, 2018
    Date of Patent: March 31, 2020
    Assignee: CLEAN WATER SERVICES
    Inventors: Chris Maher, Mike Gates, Robert Baur
  • Publication number: 20190119138
    Abstract: A method of treating a mixture of microorganisms containing phosphorus and magnesium, by first inducing the mixture microorganisms to release phosphorus and magnesium. Next an emancipation or elutriation is performed. Phosphorus and magnesium-rich liquid is then tapped off as the mixture is thickened, to produce phosphorus and magnesium-rich liquid and phosphorus and magnesium-reduced treated mixture. This treated mixture is placed in an anaerobic digester where ammonia is formed but combines very little with phosphorus or magnesium as these elements have been reduced in concentration. Then the high-ammonia mixture is dewatered, to produce an ammonia-rich liquid, which is combined with the phosphorus and magnesium-rich liquid. In one preferred example a useable struvite product is harvested from this combination. Additionally, the production of nuisance struvite in the anaerobic digester is reduced, in comparison with prior art waste treatment methods.
    Type: Application
    Filed: October 24, 2018
    Publication date: April 25, 2019
    Applicant: Clean Water Services
    Inventors: Chris Maher, Mike Gates, Robert Baur
  • Patent number: 9489599
    Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: November 8, 2016
    Assignee: KLA-Tencor Corp.
    Inventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
  • Publication number: 20150125064
    Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
    Type: Application
    Filed: April 21, 2014
    Publication date: May 7, 2015
    Applicant: KLA-Tencor Corporation
    Inventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
  • Publication number: 20140361101
    Abstract: In one example, a personal misting device is provided that includes a portable housing sized and configured to be held in one hand of a user, and also includes a fluid reservoir attachable to the portable housing. A fluid pump and motor are disposed within the portable housing, and the fluid pump is configured and arranged for fluid communication with the fluid reservoir. Additionally, a hose is provided that has a first end in fluid communication with the fluid pump, and a second end that is connected to a misting nozzle. Finally, a power supply operable to run the fluid pump is disposed in the housing.
    Type: Application
    Filed: October 24, 2013
    Publication date: December 11, 2014
    Applicant: RealXGear
    Inventor: Chris Maher
  • Publication number: 20140223634
    Abstract: One example of a multi-layer fabric may include a PVA sponge layer, as well as a wicking layer disposed near the PVA sponge layer. The multi-layer fabric may be employed in clothing and/or other articles to facilitate achievement of a cooling effect relative to a wearer of the clothing or user of the article.
    Type: Application
    Filed: May 28, 2013
    Publication date: August 14, 2014
    Applicant: RealXGear
    Inventor: Chris Maher
  • Patent number: 8537349
    Abstract: Systems and methods for monitoring time-varying classification performance are disclosed.
    Type: Grant
    Filed: June 23, 2010
    Date of Patent: September 17, 2013
    Assignee: KLA-Tencor Corporation
    Inventors: Patrick Huet, Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher
  • Patent number: 8135204
    Abstract: Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe are provided. One method includes separating defects into bins based on regions in which the defects are located, defect types, and values of the defects for parameter(s) of a detection algorithm. The method also includes determining a number of the defects to be selected from each bin by distributing a user-specified target number of defects across the bins. In addition, the method includes selecting defects from the bins based on the determined numbers thereby creating a defect sample for use in selecting values of parameter(s) of the detection algorithm for use in the inspection recipe.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: March 13, 2012
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Chien-Huei (Adam) Chen, Barry Becker, Hong Chen, Michael Van Riet, Chris Maher, Stephanie Chen, Suryanarayana Tummala, Yong Zhang
  • Patent number: 8126255
    Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: February 28, 2012
    Assignee: KLA-Tencor Corp.
    Inventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecelia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
  • Publication number: 20120028624
    Abstract: A system for improving safe operation of mobile communication devices includes an operational module installable on a mobile communication device. The mobile communication device is able to communicate wirelessly over a mobile communications network and has a plurality of internal sensors, a plurality of external sensors, a user interface, and a plurality of communications modules. The operational module is able to monitor at least one of the internal sensors and the external sensors, to determine whether the mobile communication device state is one of a plurality of predetermined device states. The predetermined device states represent predetermined watch list operations, which are determined based on improving the safe operation of the mobile communication device.
    Type: Application
    Filed: July 30, 2010
    Publication date: February 2, 2012
    Applicant: TCMD Holdings, LLC
    Inventors: Maya P. Jedlicka, Chris Maher, Terry Maher
  • Patent number: 8073240
    Abstract: Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion of the different optical modes indicated as the candidates for use in the inspection.
    Type: Grant
    Filed: May 6, 2008
    Date of Patent: December 6, 2011
    Assignee: KLA-Tencor Corp.
    Inventors: Verlyn Fischer, Chris Maher, Harish Hiriyannaiah, Younus Vora, Ping Ding, Andrew Hill
  • Publication number: 20110224932
    Abstract: Systems and methods for monitoring time-varying classification performance are disclosed.
    Type: Application
    Filed: June 23, 2010
    Publication date: September 15, 2011
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Patrick Huet, Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher
  • Patent number: 8000922
    Abstract: Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: August 16, 2011
    Assignee: KLA-Tencor Corp.
    Inventors: Hong Chen, Michael J. Van Riet, Chien-Huei (Adam) Chen, Jason Z. Lin, Chris Maher, Michal Kowalski, Barry Becker, Stephanie Chen, Subramanian Balakrishnan, Suryanarayana Tummala
  • Publication number: 20090299681
    Abstract: Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.
    Type: Application
    Filed: May 29, 2008
    Publication date: December 3, 2009
    Inventors: Hong Chen, Michael J. Van Riet, Chien-Huei (Adam) Chen, Jason Z. Lin, Chris Maher, Michal Kowalski, Barry Becker, Stephanie Chen, Subramanian Balakrishnan, Suryanarayana Tummala
  • Publication number: 20090080759
    Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
    Type: Application
    Filed: September 19, 2008
    Publication date: March 26, 2009
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecilia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
  • Publication number: 20080279444
    Abstract: Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion of the different optical modes indicated as the candidates for use in the inspection.
    Type: Application
    Filed: May 6, 2008
    Publication date: November 13, 2008
    Inventors: Verlyn Fischer, Chris Maher, Harish Hiriyannaiah, Younus Vora, Ping Ding, Andrew Hill