Patents by Inventor Chris Maher
Chris Maher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11114324Abstract: Systems and methods for detecting defect candidates on a specimen are provided. One method includes, after scanning of at least a majority of a specimen is completed, applying one or more segmentation methods to at least a substantial portion of output generated during the scanning thereby generating two or more segments of the output. The method also includes separately detecting outliers in the two or more segments of the output. In addition, the method includes detecting defect candidates on the specimen by applying one or more predetermined criteria to results of the separately detecting to thereby designate a portion of the detected outliers as the defect candidates.Type: GrantFiled: October 15, 2019Date of Patent: September 7, 2021Assignee: KLA Corp.Inventors: Martin Plihal, Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani, Chris Maher
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Patent number: 10832396Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.Type: GrantFiled: March 25, 2019Date of Patent: November 10, 2020Assignee: KLA-Tencor Corp.Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
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Publication number: 20200328104Abstract: Systems and methods for detecting defect candidates on a specimen are provided. One method includes, after scanning of at least a majority of a specimen is completed, applying one or more segmentation methods to at least a substantial portion of output generated during the scanning thereby generating two or more segments of the output. The method also includes separately detecting outliers in the two or more segments of the output. In addition, the method includes detecting defect candidates on the specimen by applying one or more predetermined criteria to results of the separately detecting to thereby designate a portion of the detected outliers as the defect candidates.Type: ApplicationFiled: October 15, 2019Publication date: October 15, 2020Inventors: Martin Plihal, Erfan Soltanmohammadi, Prasanti Uppaluri, Mohit Jani, Chris Maher
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Publication number: 20200126212Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.Type: ApplicationFiled: March 25, 2019Publication date: April 23, 2020Inventors: Brian Duffy, Martin Plihal, Santosh Bhattacharyya, Gordon Rouse, Chris Maher, Erfan Soltanmohammadi
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Patent number: 10604433Abstract: A method of treating a mixture of microorganisms containing phosphorus and magnesium, by first inducing the mixture microorganisms to release phosphorus and magnesium. Next an emancipation or elutriation is performed. Phosphorus and magnesium-rich liquid is then tapped off as the mixture is thickened, to produce phosphorus and magnesium-rich liquid and phosphorus and magnesium-reduced treated mixture. This treated mixture is placed in an anaerobic digester where ammonia is formed but combines very little with phosphorus or magnesium as these elements have been reduced in concentration. Then the high-ammonia mixture is dewatered, to produce an ammonia-rich liquid, which is combined with the phosphorus and magnesium-rich liquid. In one preferred example a useable struvite product is harvested from this combination. Additionally, the production of nuisance struvite in the anaerobic digester is reduced, in comparison with prior art waste treatment methods.Type: GrantFiled: October 24, 2018Date of Patent: March 31, 2020Assignee: CLEAN WATER SERVICESInventors: Chris Maher, Mike Gates, Robert Baur
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Publication number: 20190119138Abstract: A method of treating a mixture of microorganisms containing phosphorus and magnesium, by first inducing the mixture microorganisms to release phosphorus and magnesium. Next an emancipation or elutriation is performed. Phosphorus and magnesium-rich liquid is then tapped off as the mixture is thickened, to produce phosphorus and magnesium-rich liquid and phosphorus and magnesium-reduced treated mixture. This treated mixture is placed in an anaerobic digester where ammonia is formed but combines very little with phosphorus or magnesium as these elements have been reduced in concentration. Then the high-ammonia mixture is dewatered, to produce an ammonia-rich liquid, which is combined with the phosphorus and magnesium-rich liquid. In one preferred example a useable struvite product is harvested from this combination. Additionally, the production of nuisance struvite in the anaerobic digester is reduced, in comparison with prior art waste treatment methods.Type: ApplicationFiled: October 24, 2018Publication date: April 25, 2019Applicant: Clean Water ServicesInventors: Chris Maher, Mike Gates, Robert Baur
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Patent number: 9489599Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.Type: GrantFiled: April 21, 2014Date of Patent: November 8, 2016Assignee: KLA-Tencor Corp.Inventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
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Publication number: 20150125064Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.Type: ApplicationFiled: April 21, 2014Publication date: May 7, 2015Applicant: KLA-Tencor CorporationInventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
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Publication number: 20140361101Abstract: In one example, a personal misting device is provided that includes a portable housing sized and configured to be held in one hand of a user, and also includes a fluid reservoir attachable to the portable housing. A fluid pump and motor are disposed within the portable housing, and the fluid pump is configured and arranged for fluid communication with the fluid reservoir. Additionally, a hose is provided that has a first end in fluid communication with the fluid pump, and a second end that is connected to a misting nozzle. Finally, a power supply operable to run the fluid pump is disposed in the housing.Type: ApplicationFiled: October 24, 2013Publication date: December 11, 2014Applicant: RealXGearInventor: Chris Maher
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Publication number: 20140223634Abstract: One example of a multi-layer fabric may include a PVA sponge layer, as well as a wicking layer disposed near the PVA sponge layer. The multi-layer fabric may be employed in clothing and/or other articles to facilitate achievement of a cooling effect relative to a wearer of the clothing or user of the article.Type: ApplicationFiled: May 28, 2013Publication date: August 14, 2014Applicant: RealXGearInventor: Chris Maher
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Patent number: 8537349Abstract: Systems and methods for monitoring time-varying classification performance are disclosed.Type: GrantFiled: June 23, 2010Date of Patent: September 17, 2013Assignee: KLA-Tencor CorporationInventors: Patrick Huet, Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher
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Patent number: 8135204Abstract: Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe are provided. One method includes separating defects into bins based on regions in which the defects are located, defect types, and values of the defects for parameter(s) of a detection algorithm. The method also includes determining a number of the defects to be selected from each bin by distributing a user-specified target number of defects across the bins. In addition, the method includes selecting defects from the bins based on the determined numbers thereby creating a defect sample for use in selecting values of parameter(s) of the detection algorithm for use in the inspection recipe.Type: GrantFiled: September 21, 2007Date of Patent: March 13, 2012Assignee: KLA-Tencor Technologies Corp.Inventors: Chien-Huei (Adam) Chen, Barry Becker, Hong Chen, Michael Van Riet, Chris Maher, Stephanie Chen, Suryanarayana Tummala, Yong Zhang
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Patent number: 8126255Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.Type: GrantFiled: September 19, 2008Date of Patent: February 28, 2012Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecelia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
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Publication number: 20120028624Abstract: A system for improving safe operation of mobile communication devices includes an operational module installable on a mobile communication device. The mobile communication device is able to communicate wirelessly over a mobile communications network and has a plurality of internal sensors, a plurality of external sensors, a user interface, and a plurality of communications modules. The operational module is able to monitor at least one of the internal sensors and the external sensors, to determine whether the mobile communication device state is one of a plurality of predetermined device states. The predetermined device states represent predetermined watch list operations, which are determined based on improving the safe operation of the mobile communication device.Type: ApplicationFiled: July 30, 2010Publication date: February 2, 2012Applicant: TCMD Holdings, LLCInventors: Maya P. Jedlicka, Chris Maher, Terry Maher
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Patent number: 8073240Abstract: Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion of the different optical modes indicated as the candidates for use in the inspection.Type: GrantFiled: May 6, 2008Date of Patent: December 6, 2011Assignee: KLA-Tencor Corp.Inventors: Verlyn Fischer, Chris Maher, Harish Hiriyannaiah, Younus Vora, Ping Ding, Andrew Hill
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Publication number: 20110224932Abstract: Systems and methods for monitoring time-varying classification performance are disclosed.Type: ApplicationFiled: June 23, 2010Publication date: September 15, 2011Applicant: KLA-TENCOR CORPORATIONInventors: Patrick Huet, Brian Duffy, Martin Plihal, Thomas Trautzsch, Chris Maher
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Patent number: 8000922Abstract: Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.Type: GrantFiled: May 29, 2008Date of Patent: August 16, 2011Assignee: KLA-Tencor Corp.Inventors: Hong Chen, Michael J. Van Riet, Chien-Huei (Adam) Chen, Jason Z. Lin, Chris Maher, Michal Kowalski, Barry Becker, Stephanie Chen, Subramanian Balakrishnan, Suryanarayana Tummala
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Publication number: 20090299681Abstract: Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which includes values for the parameter(s) of the detection algorithm determined for the defects in the portion. The information can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.Type: ApplicationFiled: May 29, 2008Publication date: December 3, 2009Inventors: Hong Chen, Michael J. Van Riet, Chien-Huei (Adam) Chen, Jason Z. Lin, Chris Maher, Michal Kowalski, Barry Becker, Stephanie Chen, Subramanian Balakrishnan, Suryanarayana Tummala
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Publication number: 20090080759Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.Type: ApplicationFiled: September 19, 2008Publication date: March 26, 2009Applicant: KLA-TENCOR CORPORATIONInventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecilia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
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Publication number: 20080279444Abstract: Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion of the different optical modes indicated as the candidates for use in the inspection.Type: ApplicationFiled: May 6, 2008Publication date: November 13, 2008Inventors: Verlyn Fischer, Chris Maher, Harish Hiriyannaiah, Younus Vora, Ping Ding, Andrew Hill