Patents by Inventor Christiaan Otten
Christiaan Otten has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11961698Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.Type: GrantFiled: June 10, 2021Date of Patent: April 16, 2024Assignee: ASML Netherlands B.V.Inventors: Christiaan Otten, Peter-Paul Crans, Marc Smits, Laura Del Tin, Christan Teunissen, Yang-Shan Huang, Stijn Wilem Herman Karel Steenbrink, Xuerang Hu, Qingpo Xi, Xinan Luo, Xuedong Liu
-
Publication number: 20240006147Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.Type: ApplicationFiled: September 18, 2023Publication date: January 4, 2024Applicant: ASML Netherlands B.V.Inventors: Christiaan OTTEN, Christan TEUNISSEN, Paul Hendricus SCHEEPERS, Joseph Reinier MEIJER
-
Publication number: 20230107989Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.Type: ApplicationFiled: December 9, 2022Publication date: April 6, 2023Applicant: ASML Netherlands B.V.Inventors: Christiaan OTTEN, Peter-Paul CRANS, Marc SMITS, Laura DEL TIN, Christan TEUNISSEN, Yang-Shan HUANG, Stijn Wilem Herman Karel STEENBRINK, Xuerang HU, Qingpo XI, Xinan LUO, Xuedong LIU
-
Publication number: 20230020745Abstract: Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.Type: ApplicationFiled: September 23, 2022Publication date: January 19, 2023Applicant: ASML Netherlands B.V.Inventors: Arjen Benjamin STORM, Johan Frederik Cornelis VAN GURP, Johannes Cornelis Jacobus DE LANGEN, Aaron Yang-Fay AYAL, Michiel Matthieu BRUININK, Christiaan Ruben VAN DEN BERG, Christiaan OTTEN, Laura DINU GURTLER, Marc SMITS
-
Publication number: 20230005699Abstract: Disclosed herein is an aperture body for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface; a chamber portion comprising an up-beam end, a down-beam end and an up-beam plate, wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.Type: ApplicationFiled: September 9, 2022Publication date: January 5, 2023Applicant: ASML Netherlands B.V.Inventors: Christiaan OTTEN, Christian TEUNISSEN, Boudewjin Weijert Herman Jan VAN DER KROON, Jurgen VAN SOEST
-
Publication number: 20210391139Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.Type: ApplicationFiled: June 10, 2021Publication date: December 16, 2021Inventors: Christiaan OTTEN, Peter-Paul CRANS, Marc SMITS, Laura DEL TIN, Christan TEUNISSEN, Yang-Shan HUANG, Stijn Wilem, Herman, Karel STEENBRINK, Xuerang HU, Qingpo XI, Xinan LUO, Xuedong LIU
-
Patent number: 10916362Abstract: Feedthrough device (50; 150), for forming a hermetic seal around signal conductors in a signal conductor group (60; 160) with a group width. The device comprises a slotted member (52; 152) and a base (62; 162). The base defines a through hole (65) that extends entirely through the 5 base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces (53, 54; 153, 154) on opposite sides associated with the feedthrough direction, and a side surface (55, 56; 155, 156) facing transverse to the feedthrough direction. The slotted member comprises a slot (58; 158), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and 10 into a longitudinal opening (59; 159) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.Type: GrantFiled: January 15, 2020Date of Patent: February 9, 2021Assignee: ASML NETHERLANDS B.V.Inventors: Johannes Petrus Sprengers, Christiaan Otten
-
Publication number: 20200176151Abstract: Feedthrough device (50; 150), for forming a hermetic seal around signal conductors in a signal conductor group (60; 160) with a group width. The device comprises a slotted member (52; 152) and a base (62; 162). The base defines a through hole (65) that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces (53, 54; 153, 154) on opposite sides associated with the feedthrough direction, and a side surface (55, 56; 155, 156) facing transverse to the feedthrough direction. The slotted member comprises a slot (58; 158), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening (59; 159) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.Type: ApplicationFiled: January 15, 2020Publication date: June 4, 2020Applicant: ASML Netherlands B.V.Inventors: Johannes Petrus Sprengers, Christiaan Otten
-
Patent number: 10559408Abstract: Feedthrough device (50; 150), for forming a hermetic seal around signal conductors in a signal conductor group (60; 160) with a group width. The device comprises a slotted member (52; 152) and a base (62; 162). The base defines a through hole (65) that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces (53, 54; 153, 154) on opposite sides associated with the feedthrough direction, and a side surface (55, 56; 155, 156) facing transverse to the feedthrough direction. The slotted member comprises a slot (58; 158), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening (59; 159) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.Type: GrantFiled: December 7, 2017Date of Patent: February 11, 2020Assignee: ASML Netherlands B.V.Inventors: Johannes Petrus Sprengers, Christiaan Otten
-
Publication number: 20180182594Abstract: Fiber feedthrough device (50), for forming a hermetic seal around optical fibers in a flat fiber group (60) with a group width. The device comprises a slotted member and a base (62). The base defines a hole (65) that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member (52) defines first and second surfaces (53) on opposite sides associated with the feedthrough direction, and a side surface (55, 56) facing transverse to the feedthrough direction. The slotted member comprises a slot (58), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening (59) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the fiber group width.Type: ApplicationFiled: December 27, 2016Publication date: June 28, 2018Applicant: Mapper Lithography IP B.V.Inventors: Johannes Petrus Sprengers, Christiaan Otten
-
Patent number: 10008362Abstract: Fiber feedthrough device (50), for forming a hermetic seal around optical fibers in a flat fiber group (60) with a group width. The device comprises a slotted member and a base (62). The base defines a hole (65) that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member (52) defines first and second surfaces (53) on opposite sides associated with the feedthrough direction, and a side surface (55, 56) facing transverse to the feedthrough direction. The slotted member comprises a slot (58), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening (59) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the fiber group width.Type: GrantFiled: December 27, 2016Date of Patent: June 26, 2018Assignee: Mapper Lithography IP B.V.Inventors: Johannes Petrus Sprengers, Christiaan Otten
-
Patent number: 7755742Abstract: A lithographic apparatus is disclosed in which a circular sensor is mounted to a substrate table with three leaf springs that are evenly spaced around a thermal axis of the sensor. The leaf springs are provided in two parts that are releasably attachable to each other. The leaf springs are elastic and allow some movement of the sensor relative to the substrate table on thermal expansion and contraction but ensure that the thermal center of the sensor does not move relative to the substrate table.Type: GrantFiled: October 11, 2005Date of Patent: July 13, 2010Assignee: ASML Netherlands B.V.Inventors: Sebastiaan Maria Johannes Cornelissen, Martinus Agnes Willem Cuijpers, Cornelis Christiaan Ottens, Peter Smits, Johannes Antonius Maria Van De Wal
-
Patent number: 7307688Abstract: A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.Type: GrantFiled: November 19, 2004Date of Patent: December 11, 2007Assignee: ASML Netherlands B.V.Inventors: Cornelis Christiaan Ottens, Erik Maria Rekkers
-
Patent number: 7280228Abstract: A lithographic apparatus includes a measurement system including at least one optical component and at least one electrical component. The electrical component is configured to dissipate heat. The optical component is mounted on a first frame of the apparatus, and the electrical component is mounted on a second frame of the apparatus that is thermally and mechanically decoupled from the first frame. An optical coupling is provided between the first frame and the second frame.Type: GrantFiled: July 2, 2004Date of Patent: October 9, 2007Assignee: ASML Netherlands B.V.Inventors: Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler, Edwin Eduard Nicolaas Josephus Krijnen, Robbert Edgar Van Leeuwen, Roeland Nicolaas Maria Vanneer, Cornelis Christiaan Ottens