Patents by Inventor Christian Denisse

Christian Denisse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancement
    Patent number: 8242028
    Abstract: A method for the ultraviolet (UV) treatment of etch stop and hard mask film increases etch selectivity and hermeticity by removing hydrogen, cross-linking, and increasing density. The method is particularly applicable in the context of damascene processing. A method provides for forming a semiconductor device by depositing an etch stop film or a hard mask film on a substrate and exposing the film to UV radiation and optionally thermal energy. The UV exposure may be direct or through another dielectric layer.
    Type: Grant
    Filed: April 3, 2007
    Date of Patent: August 14, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Bart van Schravendijk, Christian Denisse