Patents by Inventor Christian GRINDLING

Christian GRINDLING has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck
    Patent number: 10199255
    Abstract: According to various embodiments, a workpiece planarization arrangement may include: a chuck including at least one portion configured to support one or more workpieces; and a planarization tool configured to planarize the at least one portion of the chuck and to planarize one or more workpieces on the at least one portion of the chuck; wherein the at least one portion of the chuck includes at least one of particles, pores and/or a polymer.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: February 5, 2019
    Assignee: Infineon Technologioes AG
    Inventors: Ingo Muri, Alexander Binter, Bernhard Goller, Christian Grindling
  • Method for planarizing one or more workpieces, a workpiece planarization arrangement, a chuck and a replaceable workpiece-support for a chuck
    Patent number: 9862037
    Abstract: According to various embodiments, a workpiece planarization arrangement may include: a chuck including a support carrier; and a workpiece-support replaceably mounted on the support carrier; and a planarization tool configured to planarize the at least one portion of the workpiece-support and to planarize one or more workpieces on the at least one portion of the workpiece-support.
    Type: Grant
    Filed: March 10, 2016
    Date of Patent: January 9, 2018
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Ingo Muri, Alexander Binter, Bernhard Goller, Christian Grindling
  • METHOD FOR PLANARIZING ONE OR MORE WORKPIECES, A WORKPIECE PLANARIZATION ARRANGEMENT, A CHUCK AND A REPLACEABLE WORKPIECE-SUPPORT FOR A CHUCK
    Publication number: 20170259354
    Abstract: According to various embodiments, a workpiece planarization arrangement may include: a chuck including a support carrier; and a workpiece-support replaceably mounted on the support carrier; and a planarization tool configured to planarize the at least one portion of the workpiece-support and to planarize one or more workpieces on the at least one portion of the workpiece-support.
    Type: Application
    Filed: March 10, 2016
    Publication date: September 14, 2017
    Inventors: Ingo MURI, Alexander BINTER, Bernhard GOLLER, Christian GRINDLING
  • METHOD FOR PROVIDING A PLANARIZABLE WORKPIECE SUPPORT, A WORKPIECE PLANARIZATION ARRANGEMENT, AND A CHUCK
    Publication number: 20170263490
    Abstract: According to various embodiments, a workpiece planarization arrangement may include: a chuck including at least one portion configured to support one or more workpieces; and a planarization tool configured to planarize the at least one portion of the chuck and to planarize one or more workpieces on the at least one portion of the chuck; wherein the at least one portion of the chuck includes at least one of particles, pores and/or a polymer.
    Type: Application
    Filed: March 1, 2017
    Publication date: September 14, 2017
    Inventors: Ingo MURI, Alexander BINTER, Bernhard GOLLER, Christian GRINDLING