Patents by Inventor Christian Penzkofer

Christian Penzkofer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam source and method of manufacturing the same
    Patent number: 8723138
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Grant
    Filed: February 9, 2012
    Date of Patent: May 13, 2014
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
  • Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip
    Patent number: 8209768
    Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: June 26, 2012
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Oliver Krause, Mathieu Burri, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer
  • ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME
    Publication number: 20120131785
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Application
    Filed: February 9, 2012
    Publication date: May 31, 2012
    Applicants: NANOTOOLS GMBH, CARL ZEISS NTS GMBH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
  • Electron beam source and method of manufacturing the same
    Patent number: 8164071
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Grant
    Filed: September 30, 2009
    Date of Patent: April 24, 2012
    Assignees: Carl Zeiss NTS GmbH, nanotools GmbH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
  • METHOD OF MANUFACTURING AN SPM PROBE WITH A SCANNING TIP AND WITH AN ALIGNMENT AID LOCATED OPPOSITE THE SCANNING TIP
    Publication number: 20100095409
    Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
    Type: Application
    Filed: October 9, 2009
    Publication date: April 15, 2010
    Applicant: NANOWORLD AG
    Inventors: Thomas SULZBACH, Oliver KRAUSE, Mathieu BURRI, Manfred DETTERBECK, Bernd IRMER, Christian PENZKOFER
  • ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME
    Publication number: 20100078557
    Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
    Type: Application
    Filed: September 30, 2009
    Publication date: April 1, 2010
    Applicants: CARL ZEISS NTS GMBH, NANOTOOLS GMBH
    Inventors: Volker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer