Patents by Inventor Christian Siladie

Christian Siladie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY
    Publication number: 20170278679
    Abstract: A substrate processing system includes a gas distribution device arranged to distribute process gases over a surface of a substrate arranged in a substrate processing chamber having an upper chamber region and a lower chamber region. A substrate support is arranged in the lower chamber region of the substrate processing chamber below the gas distribution device. A ring is arranged in the lower chamber region of the substrate processing chamber below the gas distribution device and above the substrate support. The ring is arranged to surround a faceplate of the gas distribution device and a region between the gas distribution device and the substrate support, and a gap is defined between the substrate support and the ring.
    Type: Application
    Filed: March 21, 2017
    Publication date: September 28, 2017
    Inventors: Ivelin Angelov, Christian Siladie, Arun Keshavamurthy, Joon Hong Park, Jason Treadwell