Abstract: What is suggested is a micromembrane pumping device for pumping a fluid, having: a pump chamber to which an inlet valve, an outlet valve, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and influencing means for influencing the plate-shaped actuator and the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to and electrically insulated from the plate-shaped membrane body by an electrically insulating glue layer; wherein at least one embedded portion of a support body at or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the glue layer to detect the volume of the pump chamber; wherein the influe

Abstract: A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

Abstract: A free jet dosage system serves for administering a fluid into an eye. The free jet dosage system includes a micropump having an inlet and an outlet, the micropump being configured to transfer the fluid from the inlet to the outlet and to dispense the fluid at the outlet to the eye as a free jet. The free jet dosage system further includes a sensor configured to sense the eye and to controller a control, and a micropump, wherein the controller is configured to activate the micropump as soon as the eye is sensed by the sensor.

Abstract: The invention relates to an apparatus having a pressure chamber and a micropump in fluid connection with the pressure chamber. The pressure chamber includes a gas-carrying region and a liquid-carrying region. The micropump is configured to generate a pneumatic pressure within the gas-carrying region that is lower than a fluid pressure of a liquid flowing through the liquid-carrying region. According to the invention, a gas-permeable and liquid-impermeable separating element separates, at least in sections, the gas-carrying region and the liquid-carrying region. According to the present invention, the micropump is disposed on the pressure chamber.

Abstract: A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

Abstract: A control apparatus controls at least one manipulator for modifying a parameter of a microlithographic projection exposure apparatus by generating a target for a travel variable, which defines a modification of the parameter to be undertaken via the manipulator. The control apparatus is configured to generate the target from a state characterization of the projection exposure apparatus by optimizing a merit function. A merit function includes at least one penalty term for taking account of a limit for a property of the projection exposure apparatus as an implicit constraint and the penalty term is formulated in such a way that the function value thereof tends to “infinity” as the property approaches the limit.

Abstract: The invention relates to a device having an opening defining a fluid connection between a fluid channel in the device and ambient air, a sensor coupled to the fluid channel, configured to sense at least one component of the ambient air, and a micro fluid actuator connected downstream of the sensor, configured, in the suction stroke, to suck in fluid through the fluid channel and to transport the same towards the sensor, and, in the pressure stroke, to transport the sucked-in fluid through said fluid channel back towards the opening. According to the invention, the sensor is arranged spaced apart from the opening, and the volume of the fluid channel between the sensor and the opening is equal to or smaller than the stroke volume which the micro fluid actuator may convey with a single suction stroke.

Abstract: A free-jet dosing system for administering a fluid into or under the skin having a micropump and a nozzle arranged on the outlet side. The micropump has an inlet and an outlet and is configured to transport a fluid from the inlet to the outlet and to generate a blocking pressure of at least 20 bar at the outlet. The nozzle is configured to output the fluid output at the outlet as a free jet at a fluid pressure so that the fluid of the free jet may be injected into the skin.

Abstract: A control apparatus controls at least one manipulator for modifying a parameter of a microlithographic projection exposure apparatus by generating a target for a travel variable, which defines a modification of the parameter to be undertaken via the manipulator. The control apparatus is configured to generate the target from a state characterization of the projection exposure apparatus by optimizing a merit function. A merit function includes at least one penalty term for taking account of a limit for a property of the projection exposure apparatus as an implicit constraint and the penalty term is formulated in such a way that the function value thereof tends to “infinity” as the property approaches the limit.

Abstract: The invention relates to an apparatus having a pressure chamber and a micropump in fluid connection with the pressure chamber. The pressure chamber includes a gas-carrying region and a liquid-carrying region. The micropump is configured to generate a pneumatic pressure within the gas-carrying region that is lower than a fluid pressure of a liquid flowing through the liquid-carrying region. According to the invention, a gas-permeable and liquid-impermeable separating element separates, at least in sections, the gas-carrying region and the liquid-carrying region. According to the present invention, the micropump is disposed on the pressure chamber.

Abstract: The invention relates to a device having an opening defining a fluid connection between a fluid channel in the device and ambient air, a sensor coupled to the fluid channel, configured to sense at least one component of the ambient air, and a micro fluid actuator connected downstream of the sensor, configured, in the suction stroke, to suck in fluid through the fluid channel and to transport the same towards the sensor, and, in the pressure stroke, to transport the sucked-in fluid through said fluid channel back towards the opening. According to the invention, the sensor is arranged spaced apart from the opening, and the volume of the fluid channel between the sensor and the opening is equal to or smaller than the stroke volume which the micro fluid actuator may convey with a single suction stroke.

Abstract: An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.

Abstract: A method of operating a projection exposure tool for microlithography is provided. The projection exposure tool has a projection objective for imaging object structures on a mask into an image plane using electromagnetic radiation, during which imaging the electromagnetic radiation causes a change in optical properties of the projection objective.

Abstract: A switched mode power supply circuit includes a switching converter receiving an input voltage and generating an output voltage from the input voltage in accordance with a switching signal. A switching controller unit is configured to generate the switching signal in accordance with a control parameter set such that the output voltage matches a set-point.

Abstract: A film element of an EUV-transmitting wavefront correction device is arranged in a beam path and includes a first layer of first layer material having a first complex refractive index n1=(1??1)+iß1, with a first optical layer thickness, which varies locally over the used region in accordance with a first layer thickness profile, and a second layer of second layer material having a second complex refractive index n2=(1??2)+iß2, with a second optical layer thickness, which varies locally over the used region in accordance with a second layer thickness profile. The first and second layer thickness profiles differ. The deviation ?1 of the real part of the first refractive index from 1 is large relative to the absorption coefficient ß1 of the first layer material and the deviation ?2 of the real part of the second refractive index from 1 is small relative to the absorption coefficient ß2 of the second layer material.

Abstract: A switched mode power supply circuit includes a switching converter receiving an input voltage and generating an output voltage from the input voltage in accordance with a switching signal. A switching controller unit is configured to generate the switching signal in accordance with a control parameter set such that the output voltage matches a set-point.

Abstract: An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Abstract: A switched mode power supply circuit includes a switching converter receiving an input voltage and generating an output voltage from the input voltage in accordance with a switching signal. A switching controller unit is configured to generate the switching signal in accordance with a control parameter set such that the output voltage matches a set-point.

Abstract: A method for determining a corrected variable, which depends on at least one parameter, in a parameter range of the parameter, includes carrying out a measurement, measurement values of the variable being made available in a plurality of separate and non-overlapping subranges of the parameter range; correcting measurement values of the variable using an approximation, in which measurement values of the variable are approximated with a smooth function and with subrange functions of the subranges of the parameter range. The smooth function allows reproduction of the progression of the variable over the parameter range. The subrange functions permit an individual change of the variable in the subranges. Also disclosed are methods for adjusting imaging optics of an optical system, devices for determining a corrected variable, which depends on at least one parameter in a parameter range, and methods for determining a plurality of corrected wavefront errors in an image field.

Abstract: A film element of an EUV-transmitting wavefront correction device is arranged in a beam path and includes a first layer of first layer material having a first complex refractive index n1=(1??1)+i?1, with a first optical layer thickness, which varies locally over the used region in accordance with a first layer thickness profile, and a second layer of second layer material having a second complex refractive index n2=(1??2)+i?2, with a second optical layer thickness, which varies locally over the used region in accordance with a second layer thickness profile. The first and second layer thickness profiles differ. The deviation ?1 of the real part of the first refractive index from 1 is large relative to the absorption coefficient ?1 of the first layer material and the deviation ?2 of the real part of the second refractive index from 1 is small relative to the absorption coefficient ?2 of the second layer material.