Patents by Inventor Christoph Hocke

Christoph Hocke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
    Publication number: 20070187272
    Abstract: The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.
    Type: Application
    Filed: December 22, 2006
    Publication date: August 16, 2007
    Inventors: Anja Bonness, Marcel Choudhury, Karin Eggers, Andreas Frangen, Norbert Kallis, Wolfgang Keller, Christoph Hocke, Michael Lering, Michael Roesner, Ruediger Hunger, Christoph Noelscher, Gregor Kubart
  • Installation for processing a semiconductor wafer and method for operating the installation
    Patent number: 7054714
    Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.
    Type: Grant
    Filed: March 27, 2003
    Date of Patent: May 30, 2006
    Assignee: Infineon Technologies AG
    Inventors: Christoph Hocke, Michael Lering, Gregor Kübart
  • Installation for processing a semiconductor wafer and method for operating the installation
    Publication number: 20030187537
    Abstract: An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.
    Type: Application
    Filed: March 27, 2003
    Publication date: October 2, 2003
    Inventors: Christoph Hocke, Michael Lering, Gregor Kubart