Abstract: An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The electron beam induced deposition (EBID or, shorter, EBD) structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.

Abstract: An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.