Abstract: A method of manufacturing an integrated semiconductor optical waveguiding device comprising an elongated waveguide, the method comprising: providing a material stack comprising a substrate layer, an anisotropically wet etchable conductive layer, a waveguiding core layer, an etch-guiding layer between the substrate layer and the waveguiding core layer, and InP material between the etch-guiding layer and the waveguiding core layer; etching said material stack down to and including said waveguiding core layer, to form an elongated shape of the elongated waveguide together with an etched area laterally beside the waveguide; providing an etch mask material across the formed waveguide; and wet etching parts of said etched areas that are not protected by the etch mask, to remove material of the etch-guiding layer across a lateral direction of the waveguide, forming a laterally extending through tunnel in the etch-guiding layer and in the conductive layer.

Abstract: An optical interference modulator comprises a main input, a main output, an optical splitter connected to the main input, first and second MMI couplers, each with a first primary-end access port connected to the splitter; a second primary-end access port connected to the main output; a first secondary-end access port connected to a respective primary waveguide; and a second secondary-end access port connected to a respective secondary waveguide. A light reflector is arranged to reflect light incident from said primary and secondary waveguides back into the same respective waveguide such that light travelling through the respective waveguide from the respective secondary-end access port, after reflection, travels back to the same secondary-end access port. For the MMI couplers, at least one of the respective primary and secondary waveguides comprises a respective light phase modulating device arranged to modulate the phase of light travelling along the corresponding waveguide in either direction.

Abstract: A method of manufacturing an integrated semiconductor optical waveguiding device comprising an elongated waveguide, the method comprising: providing a material stack comprising a substrate layer, an anisotropically wet etchable conductive layer, a waveguiding core layer, an etch-guiding layer between the substrate layer and the waveguiding core layer, and InP material between the etch-guiding layer and the waveguiding core layer; etching said material stack down to and including said waveguiding core layer, to form an elongated shape of the elongated waveguide together with an etched area laterally beside the waveguide; providing an etch mask material across the formed waveguide; and wet etching parts of said etched areas that are not protected by the etch mask, to remove material of the etch-guiding layer across a lateral direction of the waveguide, forming a laterally extending through tunnel in the etch-guiding layer and in the conductive layer.

Abstract: An electro-optical modulator includes a substrate comprising a first Mach-Zehnder modulator comprising a first waveguide and a second waveguide and a second Mach-Zehnder modulator comprising a first waveguide and a second waveguide. A first positive signal electrode is positioned on the substrate over the first waveguide of the first Mach-Zehnder modulator and a first negative signal electrode is positioned on the substrate over the second waveguide of the first Mach-Zehnder modulator. The first positive signal electrode and the first negative signal electrode are connected to a first differential signal input. A second positive signal electrode is positioned on the substrate over the first waveguide of the second Mach-Zehnder modulator and a second negative signal electrode positioned on the substrate over the second waveguide of the second Mach-Zehnder modulator. The second positive signal electrode and the second negative signal electrode are connected to a second differential signal input.

Abstract: Method for modulating a carrier light wave to achieve, a modulated light wave which carries information by symbols selected from a set of at least two different symbols. The light led through each path is phase-shifted by a respective total variable part phase shift, which for each path is the sum of at least three respective variable part phase shifts. Each variable part phase shift for each modulation state assumes one of two respective predetermined values, and each symbol is modulated using a respective combination of two such total variable part phase shifts. The modulation performed by the two paths is a PSK (Phase Shift Keying) modulation scheme, the group of symbols includes 2N unique symbols, the light led through each respective path is phase shifted using 2N?1 variable part phase shifts, and the respective difference between the respective predetermined values is the same for all variable part phase shifts.

Abstract: Method for modulating a carrier light wave to achieve, a modulated light wave which carries information by symbols selected from a set of at least two different symbols. The light led through each path is phase-shifted by a respective total variable part phase shift, which for each path is the sum of at least three respective variable part phase shifts. Each variable part phase shift for each modulation state assumes one of two respective predetermined values, and each symbol is modulated using a respective combination of two such total variable part phase shifts. The modulation performed by the two paths is a PSK (Phase Shift Keying) modulation scheme, the group of symbols includes 2N unique symbols, the light led through each respective path is phase shifted using 2N?1 variable part phase shifts, and the respective difference between the respective predetermined values is the same for all variable part phase shifts.