Abstract: Spectroscopic analysis systems and methods for analyzing samples are disclosed. An analysis system may contain an electromagnetic radiation source to provide radiation, a spectroscopic analysis chamber to perform a coherent Raman spectroscopy (e.g., stimulated Raman or coherent anti-Stokes Raman spectroscopy), and a radiation detector to detect radiation based on the spectroscopy. The chamber may have a resonant cavity to contain a sample for analysis, at least one window to the cavity to transmit the first radiation into the cavity and to transmit a second radiation out, a plurality of reflectors affixed to a housing of the cavity to reflect radiation of a predetermined frequency, the plurality of reflectors separated by a distance that is sufficient to resonate the radiation. The spectroscopic analysis system may be coupled with a nucleic acid sequencing system to receive a single nucleic acid derivative in solution and identify the derivative to sequence the nucleic acid.

Abstract: The device and method disclosed herein concern detecting, identifying, and or quantifying analytes, such as nucleic acids, with high resolution and fast response times using surface enhanced coherent anti-Stokes Raman spectroscopy. In certain embodiments of the invention, a small number molecular sample of the analyte 210 such as a nucleotide, passes through a microfluidic channel, microchannel, or nanochannel 185 and sample cell 175 that contains Raman-active surfaces, and is detected by surface enhanced, coherent anti-Stokes Raman spectroscopy (SECARS). Other embodiments of the invention concern an apparatus for analyte detection.

Abstract: The device and method disclosed herein concern detecting, identifying, and or quantifying analytes, such as nucleic acids, with high resolution and fast response times using surface enhanced coherent anti-Stokes Raman spectroscopy. In certain embodiments of the invention, a small number molecular sample of the analyte 210 such as a nucleotide, passes through a microfluidic channel, microchannel, or nanochannel 185 and sample cell 175 that contains Raman-active surfaces, and is detected by surface enhanced, coherent anti-Stokes Raman spectroscopy (SECARS). Other embodiments of the invention concern an apparatus for analyte detection.

Abstract: Testing of a mask which is intended to be used for low wavelength lithography. At lower wavelengths, e.g., 157 nm, certain contaminants may become visible, even though they were transparent under visible or ultraviolet light. A combination of Raman spectroscopy and infrared absorption spectroscopy are used to identify the contaminants.

Abstract: Testing of a mask which is intended to be used for low wavelength lithography. At lower wavelengths, e.g., 157 nm, certain contaminants may become visible, even though they were transparent under visible or ultraviolet light. A combination of Raman spectroscopy and infrared absorption spectroscopy are used to identify the contaminants.