Patents by Inventor Christopher J. Gould

Christopher J. Gould has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay measurement technique using moire patterns
    Patent number: 6150231
    Abstract: Misalignment between two masking steps used in the manufacture of semiconductive devices in a wafer is determined by having a special alignment pattern on each of two masks used in the process and forming images of the masks on the semiconductor devices with the images of the alignment patterns being superimposed over one another to form a Moire pattern. The Moire pattern is compared with other Moire patterns known to correspond to particular amounts of misalignment of the masks to see if it corresponds to an acceptable alignment.
    Type: Grant
    Filed: June 15, 1998
    Date of Patent: November 21, 2000
    Assignees: Siemens Aktiengesellschaft, International Business Machines Corporation
    Inventors: Karl Paul Muller, Venkatachalam C. Jaiprakash, Christopher J. Gould