Abstract: A novel coating system is provided that allows for a single coating structure to exhibit properties previously considered mutually exclusive. A unique approach for tailoring specific properties of a coating structure as a function of location within the coating is provided with a specially designed undercoat having a columnar macrostructure and a second coating layer that is selected to be compatible with and complement the undercoat. The resultant composite coating system can maintain thermocomechanical compliance while improving various bulk and/or free surface properties of the composite coating system.

Abstract: A system and method for producing thermal spray coatings on a substrate from a liquid suspension is disclosed. The disclosed system and method include a thermal spray torch for generating a plasma and a liquid suspension delivery subsystem for delivering a flow of liquid suspension with sub-micron particles to the plasma to produce a plasma effluent. The liquid suspension delivery subsystem comprises an injector or nozzle which can produce a reactive gas shroud surrounding the plasma effluent. A flame envelope can also be used to isolate injection of the liquid suspension. The shroud or flame envelope can retain the sub-micron particles entrained within the plasma effluent and substantially prevent entrainment of ambient gases into the plasma effluent. The liquid suspension delivery subsystem can be arranged as an axial injection system, a radial internal injection system or an external radial injection system.

Abstract: A system and method for producing thermal spray coatings on a substrate from a liquid suspension is disclosed. The disclosed system and method include a thermal spray torch for generating a plasma and a liquid suspension delivery subsystem for delivering a flow of liquid suspension with sub-micron particles to the plasma to produce a plasma effluent. The liquid suspension delivery subsystem comprises an injector or nozzle which can produce an inert or reactive gas sheath partially or fully surrounding the plasma effluent. A sheath can also be used to isolate injection of the liquid suspension. A gas assist stream can also be employed at or near the suspension injection point. The shroud, sheath or gas assist technique can retain the sub-micron particles entrained within the plasma effluent and substantially prevent entrainment of ambient gases into the plasma effluent.

Abstract: This invention relates to thermal spray composite coatings on a metal or non-metal substrate. The thermal spray composite coatings comprise (i) a ceramic composite coating undercoat layer having at least two ceramic material phases randomly and uniformly dispersed and/or spatially oriented throughout the ceramic composite coating, and (ii) a ceramic coating topcoat layer applied to the undercoat layer. At least a first ceramic material phase is present in the undercoat layer in an amount sufficient to provide corrosion resistance to the ceramic composite coating, and at least a second ceramic material phase is present in the undercoat layer in an amount sufficient to provide plasma erosion resistance to the ceramic composite coating. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings.

Abstract: This invention relates to thermal spray composite coatings on a metal or non-metal substrate. The thermal spray composite coatings comprise a ceramic composite coating having at least two ceramic material phases randomly and uniformly dispersed and/or spatially oriented throughout the ceramic composite coating. At least a first ceramic material phase is present in an amount sufficient to provide corrosion resistance to the ceramic composite coating, and at least a second ceramic material phase is present in an amount sufficient to provide plasma erosion resistance to the ceramic composite coating. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The composite coatings provide erosion and corrosion resistance at processing temperatures higher than conventional processing temperatures used in the semiconductor etch industry, e.g., greater than 100° C.

Abstract: This invention relates to thermal spray coatings on a metal or non-metal substrate. The thermal spray coating comprises a ceramic coating having a functionally graded porosity across the ceramic coating thickness. The ceramic coating includes an inner layer and an outer layer. The inner layer has a porosity at or near the interface of the inner layer and the metal or non-metal substrate sufficient to provide a compliant ceramic coating capable of straining under thermal expansion mismatch between the ceramic coating and the metal or non-metal substrate at elevated temperature. The outer layer has a decreasing porosity extending from the surface of the inner layer to the surface of the ceramic coating sufficient to provide corrosion resistance and/or plasma erosion resistance to said ceramic coating. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings.

Abstract: This invention relates to thermal spray coatings on a metal or non-metal substrate. The thermal spray coating comprises a partially or fully stabilized ceramic coating, e.g., yttria stabilized zirconia coating, and has sufficiently high thermodynamic phase stability to provide corrosion and/or erosion resistance to the substrate. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The coatings are useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.