Patents by Inventor Christopher Voges

Christopher Voges has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR
    Publication number: 20230266117
    Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.
    Type: Application
    Filed: February 14, 2023
    Publication date: August 24, 2023
    Applicant: Onto Innovation Inc.
    Inventors: John Schaefer, Christopher Voges, Nicholas Smith, Jeffrey Treptau
  • Wafer inspection system including a laser triangulation sensor
    Patent number: 11578967
    Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: February 14, 2023
    Assignee: ONTO INNOVATION INC.
    Inventors: John Schaefer, Christopher Voges, Nicholas Smith, Jeffrey Treptau
  • WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR
    Publication number: 20200191557
    Abstract: One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.
    Type: Application
    Filed: June 8, 2018
    Publication date: June 18, 2020
    Applicant: Rudolph Technologies, Inc.
    Inventors: John Schaefer, Christopher Voges, Nicholas Smith, Jeff Treptau
  • Wafer edge inspection illumination system
    Patent number: 9062859
    Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.
    Type: Grant
    Filed: April 23, 2013
    Date of Patent: June 23, 2015
    Assignee: Rudolph Technologies, Inc.
    Inventors: Christopher Voges, Ajay Pai, Antony Ravi Philip, Tuan D. Le
  • Wafer edge inspection
    Patent number: 8426223
    Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.
    Type: Grant
    Filed: September 8, 2009
    Date of Patent: April 23, 2013
    Assignee: Rudolph Technologies, Inc.
    Inventors: Christopher Voges, Ajay Pai, Antony Ravi Philip, Tuan D. Le
  • WAFER EDGE INSPECTION
    Publication number: 20110263049
    Abstract: Wafer edge inspection approaches are disclosed wherein an imaging device captures at least one image of an edge of a wafer. The at least one image can be analyzed in order to identify an edge bead removal line. An illumination system having a diffuser can further be used in capturing images.
    Type: Application
    Filed: September 8, 2009
    Publication date: October 27, 2011
    Applicant: Rudolph Technologies, Inc.
    Inventors: Christopher Voges, Ajay Pai, Antony Ravi Philip, Tuan D. Le
  • Self-locking strap assembly
    Publication number: 20060243004
    Abstract: The present invention relates to a self-locking strap assembly. The assembly includes a buckle having an outer concave surface and a passageway. A strap is secured to the buckle at a first position and is adapted to be inserted into the passageway at a second position. A retainer is coupled to the buckle and adapted to engage the strap such that movement in one direction of the strap in the passageway relative to the buckle is inhibited.
    Type: Application
    Filed: June 29, 2006
    Publication date: November 2, 2006
    Inventors: Stephen Johnson, Christopher Voges, Timothy Callahan, Jason Doolittle