Patents by Inventor Christos Karanikas

Christos Karanikas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS AND METHODS OF SOLVENT TEMPERATURE CONTROL FOR WAFER COATING PROCESSES
    Publication number: 20150056820
    Abstract: Systems and methods of solvent temperature control for wafer coating processes are provided. In an embodiment, a method for spin coating a wafer includes attaching the wafer to a rotatable chuck. The chuck is then rotated, and solvent is dispensed onto the wafer. The solvent dispensing temperature is controlled while the solvent is dispensed onto the wafer.
    Type: Application
    Filed: August 20, 2013
    Publication date: February 26, 2015
    Applicant: GLOBALFOUNDRIES, Inc.
    Inventors: Jason Lewis Behnke, Christos Karanikas