Abstract: This disclosure provides systems, methods, and apparatus related to physical vapor deposition. In one aspect, an apparatus includes a magnet assembly including a magnet element, a substrate holder configured to hold a substrate, a target holder configured to hold a target positioned between the magnet assembly and the substrate, a motor configured to move the magnet assembly across a face of the substrate, and a controller. The controller includes program instructions for conducting a process including moving the magnet assembly across the face of the substrate using the motor to sputter material from the target onto the substrate. The material sputtered onto the substrate may have a substantially uniform thickness.

Abstract: An approach is provided for a lifting and conveying apparatus for chemical bath deposition (CBD). The apparatus is adapted for depositing at least one thin film on a substrate of a solar cell, and is configured for conveying a reacting container in ways of up and down and back and forth, which makes the solution evenly and fully spread on a substrate to produce a deposited thin film with a uniform thickness under a suitable reacting condition.