Abstract: An apparatus for transferring a wafer carrier is capable of recognizing both a bar code of the wafer carrier and a vision mark for position correction attached to a processing equipment. It is possible to recognize both the bar code and the vision mark using a single image recognition device, by determining a required focal length for a lens in the image recognition device, and by determining the required size of the vision mark. Therefore, a separate bar code reader to recognize the bar code is not required in the processing equipment. This results in a reduced cost and increased productivity, since the processing equipment need not to be shut down for installation of a bar code reader.

Abstract: A wafer cassette, a method for manufacturing the cassette, and equipment for semiconductor fabrication are provided. The cassette includes a container for containing wafers, a bar-code wing projecting outward from at least one of the front walls and sidewalls of the container, and a bar code formed on the surface of the bar-code wing. A bar code reader for identifying the bar codes of the cassette is provided below the upper plane of the loader/unloader portion of the equipment for semiconductor fabrication. Accordingly, an efficient loading/unloading operation of a cassette onto/from the loader/unloader portion of the equipment is enabled, wafer damage is reduced, and productivity of the manufactured semiconductor device is improved.

Abstract: A method of manufacturing a semiconductor device having a plurality of measuring steps performed by a plurality of measuring equipment comprising the steps of; (a) determining the operational state of each one of the plurality of measuring equipment, (b) selecting and performing a measuring step from the plurality of measuring steps in accordance with the determination made in step (a), and repeating steps (a) and (b) until the plurality of measuring steps is completed.

Abstract: The present invention provides a wafer cassette formed as an enclosed box in which a plurality of wafers may be stored and processed, and which has the capability of simultaneously serving as a wafer cassette box. The wafers are protected from contamination and damage by the enclosed box structure. An upper cover for the box structure is provided which is capable of being opened or closed while the side and bottom portions of the wafer cassette are permanently arranged in a closed position. The upper cover can be a slide type or swinging-door type structure, and the swinging-door type structure is hinge-coupled to at least one portion of the wafer cassette, preferably to at least one side portion. Thus, the total weight and volume of wafer transport and storage apparatus are reduced so that transport, storage and handling of the wafers is facilitated.