Patents by Inventor Claire ARMSTRONG

Claire ARMSTRONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of cooling a deposition source, chamber for cooling a deposition source and deposition system
    Patent number: 11795541
    Abstract: A method (100) of cooling a deposition source (200) is described. The method includes stopping (110) depositing material from the deposition source, the deposition source being arranged in a deposition chamber (250), and introducing (120) a cooling gas into the deposition chamber (250), the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)].
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: October 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Claire Armstrong, Frank Schnappenberger, Thomas Deppisch
  • ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR
    Publication number: 20220356027
    Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets being provided above the plurality of gas supply slits. Further, the sleeve includes a metal layer embedded within isolating material.
    Type: Application
    Filed: May 4, 2021
    Publication date: November 10, 2022
    Inventors: Thomas DEPPISCH, Stefan BANGERT, Claire ARMSTRONG, Frank SCHNAPPENBERGER
  • ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR
    Publication number: 20220356028
    Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.
    Type: Application
    Filed: May 4, 2021
    Publication date: November 10, 2022
    Inventors: Andreas SAUER, Annemarie HLADIK, Bernhard KÖHLER, Thomas DEPPISCH, Claire ARMSTRONG, Wolfgang BUSCHBECK
  • METHOD OF COOLING A DEPOSITION SOURCE, CHAMBER FOR COOLING A DEPOSITION SOURCE AND DEPOSITION SYSTEM
    Publication number: 20200332413
    Abstract: A method (100) of cooling a deposition source (200) is described. The method includes stopping (110) depositing material from the deposition source, the deposition source being arranged in a deposition chamber (250), and introducing (120) a cooling gas into the deposition chamber (250), the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)].
    Type: Application
    Filed: November 16, 2017
    Publication date: October 22, 2020
    Inventors: Claire ARMSTRONG, Frank SCHNAPPENBERGER, Thomas DEPPISCH