Patents by Inventor Claire E. KARDOS

Claire E. KARDOS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Airgap isolation structures
    Patent number: 11764258
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to airgap isolation structures and methods of manufacture. The structure includes: a bulk substrate material; a first airgap isolation structure in the bulk substrate material and having a first aspect ratio; and a second airgap isolation structure in the bulk substrate material and having a second aspect ratio different from the first aspect ratio.
    Type: Grant
    Filed: December 1, 2020
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Brett T. Cucci, Siva P. Adusumilli, Johnatan A. Kantarovsky, Claire E. Kardos, Sen Liu
  • AIRGAP ISOLATION STRUCTURES
    Publication number: 20220173211
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to airgap isolation structures and methods of manufacture. The structure includes: a bulk substrate material; a first airgap isolation structure in the bulk substrate material and having a first aspect ratio; and a second airgap isolation structure in the bulk substrate material and having a second aspect ratio different from the first aspect ratio.
    Type: Application
    Filed: December 1, 2020
    Publication date: June 2, 2022
    Inventors: Brett T. CUCCI, Siva P. ADUSUMILLI, Johnatan A. KANTAROVSKY, Claire E. KARDOS, Sen LIU