Abstract: Modular valve manifold system including a distribution tube and at least one valve mounted on the tube. Each valve has a body with an external port disposed along one of a first and a second radial axis, and a throughbore disposed along the other one of the axes and configured to receive the tube coaxially therethrough. The body is formed of a first body portion and a second body portion. The first body portion has a first face with a first channel formed therein defining a first portion of the throughbore and configured to be mounted on a first side of the tube. The second body portion has a second face with a second channel formed therein defining a second portion of the throughbore and configured to be mounted on the second tube side.

Abstract: A compact force multiplying actuator 10 and its associated valve 20 are disclosed. The actuator 10 and valve 20 include piston heads 31 and 32 and force multiplying load beams 52 and 53. Belleville springs 81 and 82 are disposed axially between the piston heads 31, 32 and the load beams 52, 53. The Belleville springs 81 and 82 act through an output member 71 to retain a valve member 88 in a closed position. When pneumatic pressure is applied against the piston heads 31 and 32, movement of the piston heads 31 and 32 is transferred through a force transfer member 45 and through the force multiplying load beams 52 and 53 to move the output member 71 against the bias of the Belleville springs 81 and 82 to allow the valve member 88 to open.

Abstract: A compact force multiplying actuator 10 and its associated valve 20 are disclosed. The actuator 10 and valve 20 include piston heads 31 and 32 and force multiplying load beams 52 and 53. Belleville springs 81 and 82 are disposed axially between the piston heads 31, 32 and the load beams 52, 53. The Belleville springs 81 and 82 act through an output member 71 to retain a valve member 88 in a closed position. When pneumatic pressure is applied against the piston heads 31 and 32, movement of the piston heads 31 and 32 is transferred through a force transfer member 45 and through the force multiplying load beams 52 and 53 to move the output member 71 against the bias of the Belleville springs 81 and 82 to allow the valve member 88 to open.

Abstract: Modular valve manifold system including a distribution tube and at least one valve mounted on the tube. Each valve has a body with an external port disposed along one of a first and a second radial axis, and a throughbore disposed along the other one of the axes and configured to receive the tube coaxially therethrough. The body is formed of a first body portion and a second body portion. The first body portion has a first face with a first channel formed therein defining a first portion of the throughbore and configured to be mounted on a first side of the tube. The second body portion has a second face with a second channel formed therein defining a second portion of the throughbore and configured to be mounted on the second tube side.

Abstract: A high Cv bulk process valve, control system and method convey a process gas or liquid for manufacturing semiconductors through a fluid passage. The fluid passage contains an aerodynamically shaped expansion chamber within which a valve seat and a moveable poppet are arranged for opening and closing the fluid passage. The aerodynamically shaped expansion chamber includes a conically expanding entry and a conically contracting exit and is shaped such that the resistance to flow of the process gas or liquid through the fluid passage of the valve is very nearly the same as through a straight tubing having a cross-sectional area of an inlet to the valve and a length of the fluid passage through the valve. The valve can be added or subtracted from a gas or liquid control system with virtually no changes in pressure drop of flow restriction, when the valve is in the open position. The valve minimizes the energy consumed by valves in semiconductor gas systems.