Patents by Inventor Clif Neil

Clif Neil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6660104
    Abstract: In a method for processing flat media, such as semiconductor wafers, first and second cassettes carrying wafers are loaded into a dual position rotor. The cassettes are restrained within the rotor by support tubes and hold down pins. Processing capacity is increased, as two cassettes are simultaneously processed.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: December 9, 2003
    Assignee: Semitool, Inc.
    Inventors: Raymon F. Thompson, Clif Neil
  • Publication number: 20020179122
    Abstract: In a method for processing flat media, such as semiconductor wafers, first and second cassettes carrying wafers are loaded into a dual position rotor. The cassettes are restrained within the rotor by support tubes and hold down pins. Processing capacity is increased, as two cassettes are simultaneously processed.
    Type: Application
    Filed: June 5, 2002
    Publication date: December 5, 2002
    Applicant: Semitool, Inc.
    Inventors: Raymon F. Thompson, Clif Neil
  • Patent number: 6418945
    Abstract: An apparatus for processing flat media, such as semiconductor wafers, has a rotor including positions for first and second cassettes. The cassettes are restrained within the rotor by support tubes and hold down pins. The processing capacity of the apparatus is increased, as the apparatus can hold two cassettes.
    Type: Grant
    Filed: July 7, 2000
    Date of Patent: July 16, 2002
    Assignee: Semitool, Inc.
    Inventors: Raymon F. Thompson, Clif Neil