Patents by Inventor Clinton K. LIEN

Clinton K. LIEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMICONDUCTOR DEVICE, AND METHOD FOR FORMING PROTECTIVE STRUCTURE ON CHAMBER
    Publication number: 20240060173
    Abstract: A system for processing a semiconductor device is provided. The system includes a chamber, a carrier disposed in the chamber and configured to holding a substrate, and a protective structure disposed on the chamber. The protective structure includes a first protective layer disposed on a surface of the chamber and a second protective layer disposed on the first protective layer. The first protective layer is amorphous. The second protective layer is crystalline.
    Type: Application
    Filed: August 16, 2022
    Publication date: February 22, 2024
    Inventors: Ren-Guan DUAN, Chen-Hsiang LU, Tien-Chih CHENG, Clinton K. LIEN