Patents by Inventor Corbett Zabierek

Corbett Zabierek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for improving a physical property defect value of a gate dielectric
    Publication number: 20050156286
    Abstract: The present invention provides a method for improving a physical property of a substrate, a method for manufacturing an integrated circuit, and an integrated circuit manufactured using the aforementioned method. In one aspect of the invention, the method for improving a physical property of a substrate includes subjecting the substrate to effects of a plasma process 830, wherein the substrate has a physical property defect value associated therewith subsequent to the plasma process. The method further includes exposing the substrate to an ultraviolet (UV) energy source 840 to improve the physical property defect value.
    Type: Application
    Filed: January 18, 2005
    Publication date: July 21, 2005
    Inventors: Brian Kirkpatrick, Mercer Brugler, Eddie Breashears, Jon Holt, Corbett Zabierek, Rajesh Khamankar
  • Method for improving a physical property defect value of a gate dielectric
    Patent number: 6869862
    Abstract: The present invention provides a method for improving a physical property of a substrate, a method for manufacturing an integrated circuit, and an integrated circuit manufactured using the aforementioned method. In one aspect of the invention, the method for improving a physical property of a substrate includes subjecting the substrate to effects of a plasma process 830, wherein the substrate has a physical property defect value associated therewith subsequent to the plasma process. The method further includes exposing the substrate to an ultraviolet (UV) energy source 840 to improve the physical property defect value.
    Type: Grant
    Filed: August 8, 2003
    Date of Patent: March 22, 2005
    Assignee: Texas Instruments Incorporated
    Inventors: Brian K. Kirkpatrick, Mercer Brugler, Eddie Breashears, Jon Holt, Corbett Zabierek, Rajesh Khamankar
  • Method for improving a physical property defect value of a gate dielectric
    Publication number: 20040029391
    Abstract: The present invention provides a method for improving a physical property of a substrate, a method for manufacturing an integrated circuit, and an integrated circuit manufactured using the aforementioned method. In one aspect of the invention, the method for improving a physical property of a substrate includes subjecting the substrate to effects of a plasma process 830, wherein the substrate has a physical property defect value associated therewith subsequent to the plasma process. The method further includes exposing the substrate to an ultraviolet (UV) energy source 840 to improve the physical property defect value.
    Type: Application
    Filed: August 8, 2003
    Publication date: February 12, 2004
    Applicant: Texas Instruments Incorporated
    Inventors: Brian K. Kirkpatrick, Mercer Brugler, Eddie Breashears, Jon Holt, Corbett Zabierek, Rajesh Khamankar