Patents by Inventor Cornelia Buehler

Cornelia Buehler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical assembly, projection exposure apparatus and projection objective
    Patent number: 7768721
    Abstract: In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: August 3, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf
  • OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJECTIVE
    Publication number: 20080316621
    Abstract: In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.
    Type: Application
    Filed: June 20, 2008
    Publication date: December 25, 2008
    Inventors: Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf