Patents by Inventor Cornelis Sander Kooijman
Cornelis Sander Kooijman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8624206Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.Type: GrantFiled: October 18, 2012Date of Patent: January 7, 2014Assignee: FEI CompanyInventors: Tom Miller, Gene Mirro, Cornelis Sander Kooijman, Hendrik Jan de Vos
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Patent number: 8586921Abstract: A method of charged-particle microscopy, comprising: irradiating a sample surface S to cause radiation to emanate from the sample; detecting at least a portion of said emitted radiation recording an output On of said detector arrangement as a function of emergence angle ?n of said emitted radiation, measured relative to an axis normal to S thus compiling a measurement set M={(On, ?n)} for a plurality of values of ?n; automatically deconvolving the measurement set M and spatially resolve it into a result set R={(VK, Lk)},in which a spatial variable V demonstrates a value Vk at an associated discrete death level Lk referenced to the surface S, whereby n and K are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.Type: GrantFiled: August 10, 2012Date of Patent: November 19, 2013Assignee: FEI CompanyInventors: Faysal Boughorbel, Pavel Potocek, Cornelis Sander Kooijman, Berend Helmerus Lich
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Patent number: 8581189Abstract: A charged-particle microscopy includes irradiating a sample in measurement sessions, each having an associated beam parameter (P) value detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, wherein an integer in the range of 1?n?N, and processing the set (S) by: defining a Point Spread Function (K) having a kernel value Kn for each value n; defining a spatial variable (V); defining an imaging quantity (Q) having fore each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; for each value of n, determining a minimum divergence min D(Mn?Kn*V) between Mn and Qn, solving V while applying constraints on the values Kn.Type: GrantFiled: August 10, 2012Date of Patent: November 12, 2013Assignee: FEI CompanyInventors: Faysal Boughorbel, Eric Gerardus Theodoor Bosch, Cornelis Sander Kooijman, Berend Helmerus Lich, Alan Frank de Jong
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Publication number: 20130277555Abstract: The invention relates to a method for analyzing the output signal of a silicon drift detector (SDD). A SDD is used for detecting X-rays emitted by a sample as a result of impinging radiation. The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon. The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval results in more uncertainty of the plateau value than a long interval. By according a weight factor, a function of the variance such that a step with low variance (high reliability) is associated with a larger weight factor than a step with high variance (low reliability), measurement values with a low variance are emphasized. This results in better resolved spectra.Type: ApplicationFiled: April 19, 2013Publication date: October 24, 2013Applicant: FEI CompanyInventors: Cornelis Sander Kooijman, Hendrik Jan De Vos
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Publication number: 20130254948Abstract: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.Type: ApplicationFiled: October 18, 2012Publication date: September 26, 2013Inventors: Arthur Reinout Hartong, Cornelis Sander Kooijman
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Patent number: 8450820Abstract: The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer.Type: GrantFiled: January 13, 2011Date of Patent: May 28, 2013Inventors: Lis Karen Nanver, Thomas Ludovicus Maria Scholtes, Agata {hacek over (S)}akić, Cornelis Sander Kooijman, Gerard Nicolaas Anne van Veen
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Publication number: 20130099114Abstract: A detector with a Silicon Diode and an amplifier, and a feedback element in the form of, for example, a resistor or a diode, switchably connected to the output of the amplifier. When the feedback element is selected via a switch, the detector operates in a Current Measurement Mode for determining electron current, and when the element is not selected the detector operates in its well-known Pulse Height Measurement Mode for determining the energy of X-ray quanta.Type: ApplicationFiled: July 9, 2012Publication date: April 25, 2013Applicant: FEI CompanyInventors: Cornelis Sander Kooijman, Gerardus Nicolaas Anne Van Veen
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Publication number: 20130037715Abstract: A method of examining a sample using a charged-particle microscope, comprising the following steps: Mounting the sample on a sample holder; Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; Using a detector arrangement to detect at least a portion of said emitted radiation, which method comprises the following steps: Recording an output On of said detector arrangement as a function of emergence angle ?n of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M={(On, ?n)} for a plurality of values of ?n; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integeType: ApplicationFiled: August 10, 2012Publication date: February 14, 2013Applicant: FEI CompanyInventors: Faysal Boughorbel, Pavel Potocek, Cornelis Sander Kooijman, Berend Helmerus Lich
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Publication number: 20130037714Abstract: Charged-particle microscopy includes irradiating a sample in N measurement sessions, each having an associated beam parameter (P) value; Detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, where n is an integer in the range 1?n?N, and processing the set (S) by: Defining a Point Spread Function (K) having a kernel value Kn for each value of n; Defining a spatial variable (V); Defining an imaging quantity (Q) having for each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; For each value of n, determining a minimum divergence min D(Mn?Kn*V) between Mn and Qn, solving for V while applying constraints on the values Kn.Type: ApplicationFiled: August 10, 2012Publication date: February 14, 2013Applicant: FEI CompanyInventors: Faysal Boughorbel, Berend Helmerus Lich, Cornelis Sander Kooijman, Eric Gerardus Theodoor Bosch, Alan Frank de Jong
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Publication number: 20130015351Abstract: Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.Type: ApplicationFiled: July 11, 2012Publication date: January 17, 2013Applicant: FEI CompanyInventors: Cornelis Sander Kooijman, Sander Richard Marie Stoks
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Patent number: 8354587Abstract: The invention relates to a hermetically sealed housing with an electrical feed-in. A standard printed circuit board 120 seals against housing 100. The sealing is carried out on a flat side of printed circuit board 120. The printed circuit board contains electrically conducting tracks (130, 132, 134, 136) which make the electrical connection. By making the electrical connection so that at least part of it lies parallel with the surface of the printed circuit board, no gas can leak through the printed circuit board along the conductor. The inside of the hermetically sealed space 102 may be a gas-filled space, but may also be a vacuum space, for example.Type: GrantFiled: October 27, 2006Date of Patent: January 15, 2013Assignee: FEI CompanyInventors: Hendrik Gezinus Tappel, Cornelis Sander Kooijman
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Patent number: 8334512Abstract: A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.Type: GrantFiled: August 24, 2011Date of Patent: December 18, 2012Assignee: FEI CompanyInventors: Uwe Luecken, Frank Jeroen Pieter Schuurmans, Cornelis Sander Kooijman
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Patent number: 8314409Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.Type: GrantFiled: August 28, 2010Date of Patent: November 20, 2012Assignee: FEI CompanyInventors: Tom Miller, Gene Mirro, Cornelis Sander Kooijman, Hendrik Jan de Vos
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Patent number: 8309921Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: GrantFiled: February 1, 2011Date of Patent: November 13, 2012Assignee: FEI CompanyInventors: Martinus Petrus Maria Bierhoff, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Steven Berger, Ben Jacobus Marie Bormans, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus W. G. Persoon
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Patent number: 8288724Abstract: The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behavior of the surface layer the current induced by a scattered electron, e.g. holes, are divided over the electrodes, so that a current I1 and I2 is induced, the sum of the current proportional to the energy of the impinging electron and the normalized ratio a function of the radial position where the electron impinges.Type: GrantFiled: December 3, 2009Date of Patent: October 16, 2012Assignee: FEI CompanyInventors: Cornelis Sander Kooijman, Gerardus Nicolaas Anne van Veen, Albertus Aemillius Seyno Sluijterman
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Patent number: 8232523Abstract: A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1?i?N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.Type: GrantFiled: April 29, 2011Date of Patent: July 31, 2012Assignee: FEI CompanyInventors: Faysal Boughorbel, Cornelis Sander Kooijman, Berend Helmerus Lich, Eric Gerardus Theodoor Bosch
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Publication number: 20120049060Abstract: A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.Type: ApplicationFiled: August 24, 2011Publication date: March 1, 2012Applicant: FEI COMPANYInventors: Uwe Luecken, Cornelis Sander Kooijman, Frank Jeroen Pieter Schuurmans
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Publication number: 20110266440Abstract: A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1?i?N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.Type: ApplicationFiled: April 29, 2011Publication date: November 3, 2011Applicant: FEI CompanyInventors: Faysal Boughorbel, Cornelis Sander Kooijman, Berend Helmerus Lich, Eric Gerardus Theodoor Bosch
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Publication number: 20110169116Abstract: The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer.Type: ApplicationFiled: January 13, 2011Publication date: July 14, 2011Applicant: FEI CompanyInventors: Lis Karen Nanver, Thomas Ludovicus Maria Scholtes, Agata Sakic, Cornelis Sander Kooijman, Gerard Nicolaas Anne van Veen
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Publication number: 20110133083Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.Type: ApplicationFiled: February 1, 2011Publication date: June 9, 2011Applicant: FEI COMPANYInventors: MART PETRUS MARIA BIERHOFF, Bart Buijsse, Cornelis Sander Kooijman, Hugo Van Leeuwen, Hendrik Gezinus Tappel, Colin August Sanford, Sander Richard Marie Stoks, Ben Jacobus Marie Bormans, Steven Berger, Koen Arnoldus Wilhelmus Driessen, Johannes Antonius Hendricus WILHELMUS Gerardus Persoon