Abstract: Embodiments relate to a carrier tape that includes a first layer of thermoplastic elastomer (TPE) adhesive tape. The carrier tape may further include a second layer of rigid polymer with a cavity. The rigid polymer may be coupled with a surface of the TPE adhesive tape such that the TPE adhesive tape is exposed by the cavity. A die may be coupled with the TPE adhesive tape within the cavity. Other embodiments may be described and/or claimed.

Abstract: A cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.