Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: A sensing device is provided having sensing circuitry, connected to an input port and the output port, with a sensor having an impedance sensitive to a parameter of interest, one or more passive electrical components, and a variable capacitor. The sensing circuitry is triggered to generate an output signal for transmission from the output port, the output signal dependent on the parameter of interest sensed by the sensor and on an input power value, Pin, of an input signal received at the input port being greater than a parametric threshold power value, Pth. A sensing system includes the sensing device and a transmitting device to transmit the input signal to the sensing device at a frequency representative of the parameter of interest. A receiving device, which can be incorporated with or located remotely from the transmitting device, receives the output signal of the sensing device, which has a frequency that is half of the frequency of the input signal transmitted by the transmitting device.

Abstract: Piezoelectric acoustic metamaterial resonators include a piezoelectric substrate having a top surface and a bottom surface and a plurality of magnetostrictive members disposed on the top surface of the piezoelectric substrate and extending along a length of the piezoelectric substrate and spaced across a width of the piezoelectric substrate.

Abstract: A transformer including a piezoelectric plate and interdigital electrodes is provided. The interdigitated electrodes includes a plurality of conductive strips disposed over the piezoelectric plate. A cross-sectional Lamé mode resonance is excited in a cross sectional plane of the piezoelectric plate in response to input voltage applied through the interdigitated electrode, producing a voltage gain. A device including the aforementioned transformer is also provided.

Abstract: A sensing device is provided having sensing circuitry, connected to an input port and the output port, with a sensor having an impedance sensitive to a parameter of interest, one or more passive electrical components, and a variable capacitor. The sensing circuitry is triggered to generate an output signal for transmission from the output port, the output signal dependent on the parameter of interest sensed by the sensor and on an input power value, Pin, of an input signal received at the input port being greater than a parametric threshold power value, Pth. A sensing system includes the sensing device and a transmitting device to transmit the input signal to the sensing device at a frequency representative of the parameter of interest. A receiving device, which can be incorporated with or located remotely from the transmitting device, receives the output signal of the sensing device, which has a frequency that is half of the frequency of the input signal transmitted by the transmitting device.

Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: A piezoelectric two-dimensional mode resonator suited for high frequency filtering applications, with the ability to simultaneously excite lateral and vertical acoustic waves.

Abstract: A microelectromechanical resonant circulator device is providing, having a substrate, and at least three electrical ports supported on the substrate. At least three electromechanical resonator elements are connected with associated switch elements and an associated port. The switch elements are operative to provide commutation over time of the electromechanical resonator elements.

Abstract: A transformer including a piezoelectric plate and interdigital electrodes is provided. The interdigitated electrodes includes a plurality of conductive strips disposed over the piezoelectric plate. A cross-sectional Lamé mode resonance is excited in a cross sectional plane of the piezoelectric plate in response to input voltage applied through the interdigitated electrode, producing a voltage gain. A device including the aforementioned transformer is also provided.

Abstract: A microelectromechanical resonant circulator device is providing, having a substrate, and at least three electrical ports supported on the substrate. At least three electromechanical resonator elements are connected with associated switch elements and an associated port. The switch elements are operative to provide commutation over time of the electromechanical resonator elements.

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

Abstract: A zero power radio frequency (RF) activated wake up device is provided. The device is based on a high-Q MEMS demodulator that filters an amplitude-modulated RF tone of interest from the entire spectrum while producing a much higher voltage signal suitable to trigger a high-Q MEMS resonant switch tuned to the modulation frequency of the RF tone.

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

Abstract: A zero power radio frequency (RF) activated wake up device is provided. The device is based on a high-Q MEMS demodulator that filters an amplitude-modulated RF tone of interest from the entire spectrum while producing a much higher voltage signal suitable to trigger a high-Q MEMS resonant switch tuned to the modulation frequency of the RF tone.

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).

Abstract: A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).