Patents by Inventor Cyril M. Kindt

Cyril M. Kindt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6610993
    Abstract: An apparatus for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a door assembly in a load port interface that separates a process environment from an operator environment. In one orientation, a port cover plate seals an opening that pierces a bulkhead, while a door panel rests horizontally on the operator environment side of the bulkhead. In this position, a cassette of wafers may be placed on an inside surface of the door panel, with the top of the stack being open. As the door rotates to a vertical position, the wafer stack moves through the bulkhead opening thereby entering the process environment. A moveable trolley, connected to or within the door, moves parallel to the wafer stack detecting the presence of wafers by sensing light scattered from wafer edges through a window in a cover plate of the door panel. In this way the apparatus determines each wafer's location and may provide that information to subsequent wafer manufacturing operations.
    Type: Grant
    Filed: June 21, 1999
    Date of Patent: August 26, 2003
    Assignee: Fortrend Engineering Corporation
    Inventors: Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt, Torben J. H. Ulander
  • Publication number: 20030107011
    Abstract: An apparatus for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a door assembly in a load port interface separating a process environment from an operator environment. A port cover plate and a door are arranged in an L-shape, with both members being able to seal the port in a bulkhead of the load port interface. In one configuration, the port cover plate seals the port, while door panel members rest horizontally on the operator side of the bulkhead. In this position, a wafer stack inside of a cassette may be placed on the inside door panel, with the top of the stack being open. As the door is raised from the horizontal position to a vertical position, the wafer stack is rotated through an opening in the bulkhead so that the wafer stack is now on the process side. The wafer mapper features a moveable trolley connected to, or within, the door.
    Type: Application
    Filed: June 21, 1999
    Publication date: June 12, 2003
    Inventors: ERIC MEYHOFER, KENNETH A HARDY, CYRIL M KINDT, TORBEN J.H. ULANDER
  • Patent number: 6396072
    Abstract: A load port interface for determining the presence or absence of wafers in a cassette, i.e. a wafer mapper, is integrated with a port closure assembly in a load port interface separating a process environment from an operator environment. A cover plate and a door are arranged in an L-shape, with both members being able to seal the port in a bulkhead of the load port interface. In one configuration, the cover plate seals the port, while door panel members rest horizontally on the operator side of the bulkhead. In this position, a wafer stack, W, inside of a cassette may be placed on the inside door panel, with the top of the wafer stack, W, being open. As the door is raised from the horizontal position to a vertical position, the wafer stack, W, is rotated through an opening in the bulkhead so that the wafer stack, W, is now on the process side. The wafer mapper features a moveable trolley connected to, or within, the door.
    Type: Grant
    Filed: April 3, 2000
    Date of Patent: May 28, 2002
    Assignee: Fortrend Engineering Corporation
    Inventors: Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt, Torben Ulander
  • Patent number: 6013920
    Abstract: A load port interface (20) receives, opens and closes a wafer carrier (22). A bulkhead (24) carries a changeable mating plate (92) that is pierced by a window (94). Changing the mating plate (92) adapts the load port interface (20) for use with different sizes of carriers(22). A table (32) of the load port interface (20) receives the carrier (22), advances the carrier (22) until it abuts and seals to the bulkhead (24). An end-effector (42), located on an opposite side of the bulkhead (24) from the carrier (22), actuates latch keys (54) to unlatch a door (48) from the carrier (22). The load port interface (20) then moves the unlatched door (48) rectilinearly, first horizontally away from the bulkhead (24) and then vertically downward, to expose semiconductor wafers (48) present within the carrier (22). The end-effector (42) includes sensors (86, 104) for collecting data about wafers (82) within the carrier (22) by detecting edges (118) thereof.
    Type: Grant
    Filed: November 25, 1998
    Date of Patent: January 11, 2000
    Assignee: Fortrend Engineering Coirporation
    Inventors: Jeffrey M. Gordon, Cyril M. Kindt, Kenneth A. Hardy, Steven A. Bumgardner, William E. Wegener, Eric Meyhofer