Abstract: The present invention relates in general to a novel microelectromechanical sensor device for detecting and measuring electric field and magnetic field. In particular, the sensor device of the present invention is useful for measuring low and high strength electric fields and magnetic fields without reference ground connection, the device comprising a first electrode and a second electrode rigidly connected together via a joining segment so that the first electrode and second electrode are mutually and dependently pivotal about an axis passing through a joining segment to form a tiltable unit, and the first electrode and the second electrode are electrically isolated from each other. The present invention further provides novel methods of using through specific arrangement of such novel sensor device.

Abstract: A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

Abstract: A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke.

Abstract: Methods and apparatus for measuring magnetic field are provided. A resonator having a resonant frequency is that varies as a function of magnetic field is driven with a drive signal, and produces an output that is converted to electrical form. This output is then processed to isolate interference components due to the drive signal and to produce a sense signal. The sense signal is the processed to produce the drive signal. The sense signal is also processed to produce an output representative of the magnetic field.

Abstract: An electrical potential sensor device comprises sensor electrodes arranged to measure a voltage based on a change in electrical charge induced in the sensor electrodes by exposure to an electrical potential of a source to be measured. An electro-thermally operated mechanism, adjacent to the sensor electrodes, is movable between a first position in which only first ones of the sensor electrodes are exposed to the electrical potential of the source to be measured and other sensor electrodes are shielded from the electrical potential, and a second position in which other ones of the sensor electrodes are exposed to the electrical potential and the first ones are substantially shielded from the electrical potential. A controller combines the output from the two sets of electrodes which are alternately exposed to the electrical potential to calculate a resulting measured/sensed voltage or measured/sensed electrical potential of the device.

Abstract: An antenna having a resonant structure, comprises an antenna element (11) and an adjacent electrode (17A) and control means (22,25) for changing a resonance frequency of the antenna element. The control means may comprise a conductive membrane (17A) spaced from the antenna element. The resonance frequency then is changed by flexing the membrane, conveniently by applying a potential difference between the membrane and an adjacent control electrode.

Abstract: An antenna having a resonant structure, comprises an antenna element (11) and an adjacent electrode (17A) and control means (22,25) for changing a resonance frequency of the antenna element. The control means may comprise a conductive membrane (17A) spaced from the antenna element. The resonance frequency then is changed by flexing the membrane, conveniently by applying a potential difference between the membrane and an adjacent control electrode.

Abstract: An electronically-steered phased array antenna comprises a plurality of antenna elements, each in the form of a resonant structure, and circuitry for changing resonance frequencies of the antenna elements so as to steer a radiation or reception beam/lobe of the phased array antenna. The antenna elements may comprise a plurality of microwave patch antenna elements each overlying one of a plurality of conductive membranes, but spaced therefrom. The resonance frequency then is changed by flexing the membrane, conveniently by applying a potential difference between the membrane and an adjacent ground plane. Additional or alternatively, phase shifting may be effected by adjusting a propagation delay of each of a plurality of feed lines coupled to the antenna elements, conveniently by means of one or more such membranes disposed adjacent each of the feed lines.