Abstract: An improved getter pump module includes a number of getter elements and a heating element that heats the getter elements. The getter elements are preferably porous, sintered getter disks. The heating element is disposed proximate to the getter elements and provides heat to activate the getter material and cause it to pump desired gasses. The getter elements and heater element are partially surrounded by a focus shield that is positioned between the getter elements and a wall of a processing chamber that encloses the getter elements, the heater element, and the focus shield. The focus shield is provided to reflect thermal energy to the getter material from the heater element, to provide high pumping speeds or short activation/baking times, and to reduce the heat seen by the chamber from the heating element. In certain embodiments of the present invention the focus shield is angled as to be wedge shaped, and may include planar extension portions. Multiple focus shields are provided in some embodiments.

Abstract: A process is provided which is capable of removing impurities from an impurity-containing hydrogen gas without generating methane. A bed of particulate nickel in an amount of at least 5% by weight as elemental nickel at a temperature of from 0.degree. C. to 50.degree. C. removes all impurities except nitrogen. Then a bed of getter material, a zirconium, vanadium and iron alloy at a temperature of from 200.degree. C. to 500.degree. C. removes the nitrogen impurity thus producing purified hydrogen with an impurity content of less that 20 ppb. A purifier for carrying out the process is also described.

Abstract: An apparatus is provided which is capable of removing impurities from an impurity-containing hydrogen gas without generating methane. A bed of particulate nickel in an amount of at least 5% by weight as elemental nickel at a temperature of from 0.degree. C. to 50.degree. C. removes all impurities except nitrogen. Then a bed of getter material, a zirconium, vanadium and iron alloy at a temperature of from 200.degree. C. to 800.degree. C. removes the nitrogen impurity thus producing purified hydrogen with an impurity content of less than 20 ppb.

Abstract: An improved apparatus and process for the removal of gaseous impurities from an impure gas stream of hydrogen contaminated with carbon monoxide, and with one or more additional impurities such as carbon dioxide, oxygen, nitrogen, water, methane.The impure gas stream is first contacted with elemental nickel in a first reaction zone under nickel-carbonyl forming conditions thereby converting substantially all the carbon monoxide to nickel carbonyl, thereby producing a partially purified gas stream.The partially purified gas stream is then contacted with Ti.sub.2 Ni or certain manganese-containing alloys in a second reaction zone to produce a fully purified gas stream.

Abstract: A steam generator has a plurality of vertically oriented boiling chambers. Feed water enters the top chamber and cascades down through drain tubes to the lower chambers. The bottom chamber has a drain to remove excess feed water. Each chamber has a feed water reservoir in which an electrical coil causes gentle boiling. The steam produced in each chamber is substantially free of droplets and is allowed to rise to the top chamber through steam passageways. A steam outlet in the top chamber allows the steam to be released for use in semiconductor wafer cleaning systems and other applications requiring pure steam. The steam generator may be formed by stacking modular units together.