Abstract: Discussed is a welding inspection apparatus for battery modules capable of applying an alternating current to a bank constituted by two or more battery cells connected in parallel and a battery module constituted by one or more banks connected in series to calculate an impedance and a resistance value of each of the one or more banks, and a method of inspecting welding of the battery module using the welding inspection apparatus.

Abstract: A battery module includes a plurality of battery cells respectively having electrode terminals and configured to be erected long in a vertical direction, an upper cover having a plurality of exposing holes to expose the upper portion of each of the plurality of battery cells to the outside at least partially, a lower cover having a plurality of exposing holes to expose the lower portion of each of the plurality of battery cells to the outside at least partially, and a filling member, of an electrically insulating material, in the plurality of exposing holes to seal the plurality of exposing holes formed in at least one of the upper cover and the lower cover.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes an equipment front end module, a loadlock chamber, a transfer chamber, and a plurality of process chambers. The loadlock chamber includes a cooling unit for cooling a substrate treated in the process chambers, and the cooling unit includes a cooling chamber having an inner space, the cooling chamber having a gas inflow hole in one surface thereof, wherein support pins on which the substrate is placed are disposed around a circumference of the gas injection hole, a cooling gas injection part supplying a cooling gas toward the gas inflow hole, and a gas exhaust part exhausting the cooling gas supplied into the cooling chamber and fumes generated from the substrate to the outside of the cooling chamber.

Abstract: Provided is a substrate treating apparatus which treats a substrate using plasma. The substrate treating apparatus includes a processing chamber having an inner space in which process treatment is performed on a substrate, a cover member coupled to the processing chamber by a hinge part and rotating upwardly and downwardly with respect to the hinge part to open/close the processing chamber, and a close preventing member disposed on a sidewall of the cover member to prevent the cover member from being closed during upward rotation of the cover member. The substrate treating apparatus prevents a cover member opening/closing a processing chamber from being sudden closed to secure operator's safety.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes an equipment front end module, a loadlock chamber, a transfer chamber, and a plurality of process chambers. The loadlock chamber includes a cooling unit for cooling a substrate treated in the process chambers, and the cooling unit includes a cooling chamber having an inner space, the cooling chamber having a gas inflow hole in one surface thereof, wherein support pins on which the substrate is placed are disposed around a circumference of the gas injection hole, a cooling gas injection part supplying a cooling gas toward the gas inflow hole, and a gas exhaust part exhausting the cooling gas supplied into the cooling chamber and fumes generated from the substrate to the outside of the cooling chamber.