Patents by Inventor Dagiang Xu

Dagiang Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature organometallic deposition of metals
    Patent number: 5130172
    Abstract: A process for coating metal on a substrate. The process uses organometallic compounds such as (trimethyl)(cyclopentadienyl) platinum in the presence of a reducing fluid such as hydrogen gas to produce high purity films capable of selective deposition on substrates containing, for example, tungsten and silicon. The films are deposited using chemical vapor deposition (CVD) or gas phase laser deposition. The invention also comprises devices made from the process of the invention.
    Type: Grant
    Filed: October 26, 1989
    Date of Patent: July 14, 1992
    Assignee: The Regents of the University of California
    Inventors: Robert F. Hicks, Herbert D. Kaesz, Dagiang Xu