Abstract: The present disclosure provides an adsorption bar, a vacuum aligner system, and a control method of the vacuum aligner system. The adsorption bar includes an electromagnetic component and an adsorption member. The electromagnetic component includes a slide bar, a coil and a movable part. The coil is fixedly arranged on the slide bar. The movable part includes an elastic element and a magnet. One end of the elastic element is a fixed end which is fixedly connected to the slide bar, and the other end thereof is a free end which is connected to the magnet. The adsorption member is fixedly connected to the magnet and is exposed at one end, of the magnet, away from the coil. Current is applied to the coil to generate a magnetic field. The magnet longitudinally slides along the slide bar under a repulsive force of the magnetic field.

Abstract: A tank for substrate cleaning, a tank heating apparatus, a tank heating method and a substrate cleaning apparatus are provided. The substrate cleaning tank includes a tank body, a hot waste gas recycle tube, a heater and a heat exchange tube. The hot waste gas recycle tube is used to receive a hot waste gas in a hot waste gas discharge tube of a production line, the heater and the heat exchange tube are used to heat a fluid in the tank body, and the heat exchange tube is communicated with the hot waste gas recycle tube. The hot waste gas is effectively utilized, the power consumption is reduced, the production cost is saved, and the discharge of the hot waste gas is reduced.

Abstract: The present disclosure provides an adsorption bar, a vacuum aligner system, and a control method of the vacuum aligner system. The adsorption bar includes an electromagnetic component and an adsorption member. The electromagnetic component includes a slide bar, a coil and a movable part. The coil is fixedly arranged on the slide bar. The movable part includes an elastic element and a magnet. One end of the elastic element is a fixed end which is fixedly connected to the slide bar, and the other end thereof is a free end which is connected to the magnet. The adsorption member is fixedly connected to the magnet and is exposed at one end, of the magnet, away from the coil. Current is applied to the coil to generate a magnetic field. The magnet longitudinally slides along the slide bar under a repulsive force of the magnetic field.

Abstract: A tank for substrate cleaning, a tank heating apparatus, a tank heating method and a substrate cleaning apparatus are provided. The substrate cleaning tank includes a tank body, a hot waste gas recycle tube, a heater and a heat exchange tube. The hot waste gas recycle tube is used to receive a hot waste gas in a hot waste gas discharge tube of a production line, the heater and the heat exchange tube are used to heat a fluid in the tank body, and the heat exchange tube is communicated with the hot waste gas recycle tube. The hot waste gas is effectively utilized, the power consumption is reduced, the production cost is saved, and the discharge of the hot waste gas is reduced.