Patents by Inventor Daisheng Mao

Daisheng Mao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUSCEPTOR FOR PLASMA PROCESSING CHAMBER
    Publication number: 20110315081
    Abstract: A susceptor for a plasma process apparatus, the susceptor having a graphite main body with a top surface for supporting at least one substrate, the top surface having a plasma sprayed aluminum oxide coating. A vacuum processing chamber, has a main chamber body, a showerhead provided at the ceiling of the chamber body, a pedestal provided inside the chamber body, and a susceptor coupled to the pedestal, the susceptor is made of a graphite main body having a top surface for supporting at least one substrate, the top surface having a dielectric coating such as, e.g., plasma sprayed aluminum oxide coating.
    Type: Application
    Filed: May 31, 2011
    Publication date: December 29, 2011
    Inventors: Kam S. Law, Daisheng Mao, Robin K. F. Law, Michael Allen Renta