Abstract: A method for forming a silicon-containing film in a recess formed on a surface of a substrate, the method includes: (a) forming a flowable film in the recess by exposing the substrate, which is adjusted to a first temperature, to plasma generated from a processing gas including a halogen-containing silane: and (b) curing the flowable film by thermally processing the substrate at a second temperature higher than the first temperature.

Abstract: A fuel system includes a centrifugal pump which pressurizes and delivers fuel that is supplied to an aircraft engine, and a transmission which connects the engine and the centrifugal pump to each other, is able to regulate a gear ratio and which modifies and transmits a rotational speed of rotational power that is output from the engine to the centrifugal pump.

Abstract: A fuel system includes: a constant-volume pump and a centrifugal pump increasing the pressure of fuel to be supplied to an engine for aviation and discharging the fuel; an operation controller configured to select in accordance with the operation state of the engine, one of a constant-volume pump-using mode of increasing the pressure of fuel using the constant-volume pump and a centrifugal pump-using mode of increasing it using the centrifugal pump; and a speed changer connecting the engine and the centrifugal pump, changing the rotational speed of rotational power output from the engine and transmitting the rotational power to the centrifugal pump, and being capable of adjusting the speed-changing ratio of the rotational speed.

Abstract: A fuel system includes: a constant-volume pump and a centrifugal pump increasing the pressure of fuel to be supplied to an engine for aviation and discharging the fuel; an operation controller configured to select in accordance with the operation state of the engine, one of a constant-volume pump-using mode of increasing the pressure of fuel using the constant-volume pump and a centrifugal pump-using mode of increasing it using the centrifugal pump; and a speed changer connecting the engine and the centrifugal pump, changing the rotational speed of rotational power output from the engine and transmitting the rotational power to the centrifugal pump, and being capable of adjusting the speed-changing ratio of the rotational speed.

Abstract: A fuel system includes a centrifugal pump which pressurizes and delivers fuel that is supplied to an aircraft engine, and a transmission which connects the engine and the centrifugal pump to each other, is able to regulate a gear ratio and which modifies and transmits a rotational speed of rotational power that is output from the engine to the centrifugal pump.