Patents by Inventor Dale Irwin

Dale Irwin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060032741
    Abstract: An adapter assembly is provided for supporting a sputtering cathode in a fixed opening in the chamber of a sputter coating machine. The assembly includes: one of several adapter bodies, each configured to support, in the fixed opening, a target of one of a plurality of sizes and types, and at one of several target-to-substrate spacings; one of several insulator rings, each for a target of a different size or type; one of several dark-space shields, each for a target of a different size, type, material, or processing pressure; and one of several adapter shields, each for a different adapter body and target material. Only the shields accumulate deposits and require cleaning or replacement. The dark-space shield is spaced from the target rim by a gap of at 0.045 to 0.067 inches to form a deep narrow space that prevents deposits onto the insulator ring while avoiding arcing and plasma formation in the gap.
    Type: Application
    Filed: October 21, 2005
    Publication date: February 16, 2006
    Inventors: John Lawson, Dale Irwin, Steve Chervenak, John McIntee
  • Patent number: 6998033
    Abstract: An adapter assembly is provided for supporting a sputtering cathode in a fixed opening in the chamber of a sputter coating machine. The assembly includes: one of several adapter bodies, each configured to support, in the fixed opening, a target of one of a plurality of sizes and types, and at one of several target-to-substrate spacings; one of several insulator rings, each for a target of a different size or type; one of several dark-space shields, each for a target of a different size, type, material, or processing pressure; and one of several adapter shields, each for a different adapter body and target material. Only the shields accumulate deposits and require cleaning or replacement. The dark-space shield is spaced from the target rim by a gap of at 0.045 to 0.067 inches to form a deep narrow space that prevents deposits onto the insulator ring while avoiding arcing and plasma formation in the gap.
    Type: Grant
    Filed: May 14, 2003
    Date of Patent: February 14, 2006
    Assignee: Tokyo Electron Limited
    Inventors: John Lawson, Dale Irwin, Steve Chervenak, John McIntee
  • Patent number: 6837974
    Abstract: A replacement chamber shield is provided for a wafer processing machine that replaces many prior art shield components with a single piece shield. The shield is particularly suitable for use in a processing chamber of a vacuum processing machine of a type for processing a wafer in a vertically-oriented split-plenum, such as machines of the type described in U.S. Pat. Nos. 4,909,695 and 4,915,564 and the machine marketed under the trademark ECLIPSE MARK II by Tokyo Electron Limited. The shield is formed of sheet material formed into an axially-extending cylindrical sidewall that turns radially inwardly into an annular shoulder that oppositely turns into an at least partially axially-extending section that further turns oppositely back radially inwardly into an annular disc having a central circular opening that is larger in diameter than the given wafer diameter. Advantageous dimensions and geometric relationships to components of the machine are described and claimed.
    Type: Grant
    Filed: January 23, 2003
    Date of Patent: January 4, 2005
    Assignee: Tokyo Electron Limited
    Inventors: John Lawson, Dale Irwin, Steve Chervenak
  • Publication number: 20040020759
    Abstract: An adapter assembly is provided for supporting a sputtering cathode in a fixed opening in the chamber of a sputter coating machine. The assembly includes: one of several adapter bodies, each configured to support, in the fixed opening, a target of one of a plurality of sizes and types, and at one of several target-to-substrate spacings; one of several insulator rings, each for a target of a different size or type; one of several dark-space shields, each for a target of a different size, type, material, or processing pressure; and one of several adapter shields, each for a different adapter body and target material. Only the shields accumulate deposits and require cleaning or replacement. The dark-space shield is spaced from the target rim by a gap of at 0.045 to 0.067 inches to form a deep narrow space that prevents deposits onto the insulator ring while avoiding arcing and plasma formation in the gap.
    Type: Application
    Filed: May 14, 2003
    Publication date: February 5, 2004
    Inventors: John Lawson, Dale Irwin, Steve Chervenak, John McIntee
  • Publication number: 20030228558
    Abstract: A method of training brokers in a multi-level marketing business to make sales of a product and to recruit new brokers includes the steps of presenting materials to train brokers on order form procedures. The order form procedures include collecting identification information and payment information. The method also includes presenting materials to train brokers on recruiting form procedures. The recruiting form procedures include collecting identification information, payment information, and the selection of sales packages. The method also includes presenting materials to train brokers on sales procedures. The sales procedures include the steps of listing prospects, approach prospects, provide a sales presentation, enroll members and brokers, and continually repeat the sales procedure.
    Type: Application
    Filed: June 11, 2002
    Publication date: December 11, 2003
    Inventors: William Dennis Bloom, Daniel Flynn Bloom, John Asa Hammack, Barry Friedman, Debra Wimberley Aaron, Dale Irwin Brooks, Mark Douglas Dixon, Brent Allen Goodwin, Carlos Fernando Gueits, James Edward Hardin, Mark Lewis Jarvis, Eugene Marvin Krank, Michael Arthur Lancto, John Michael McDonald, Bradley Scott Murray, Linda Gaye Rowden, John Alexander Southerland, William Kirby Wright, Todd William Wilson, Terrence Van Wilson
  • Publication number: 20030146085
    Abstract: A replacement chamber shield is provided for a wafer processing machine that replaces many prior art shield components with a single piece shield. The shield is particularly suitable for use in a processing chamber of a vacuum processing machine of a type for processing a wafer in a vertically-oriented split-plenum, such as machines of the type described in U.S. Pat. Nos. 4,909,695 and 4,915,564 and the machine marketed under the trademark Eclipse Mark II by Tokyo Electron Limited. The shield is formed of sheet material formed into an axially-extending cylindrical sidewall that turns radially inwardly into an annular shoulder that oppositely turns into an at least partially axially-extending section that further turns oppositely back radially inwardly into an annular disc having a central circular opening that is larger in diameter than the given wafer diameter. Advantageous dimensions and geometric relationships to components of the machine are described and claimed.
    Type: Application
    Filed: January 23, 2003
    Publication date: August 7, 2003
    Applicant: Tokyo Electron Limited
    Inventors: John Lawson, Dale Irwin, Steve Chervenak
  • Patent number: 3986752
    Abstract: A railway car center plate assembly comprising a truck bolster having a bowl-shaped truck center plate and a body bolster having secured to its underside a body center plate. The body center plate has a flat surface from which extend downwardly two substantially perpendicular, concentric, cylindrical flanges encircling a bore, the diameter of the outermost flange being such that its outer vertical surface is encompassed by the inner vertical surface of the flange on the truck center plate. Positioned between the body center plate and the truck center plate is an annular, synthetic elastomeric bearing pad which is located within and substantially fills the annular space between the flanges of the body center plate and under load contacts the vertical surfaces of the flanges of the body center plate.
    Type: Grant
    Filed: May 9, 1975
    Date of Patent: October 19, 1976
    Assignee: E. I. Du Pont de Nemours and Company
    Inventors: William Henry Bogar, Howard Dale Irwin