Patents by Inventor Daniel Arthur Brown

Daniel Arthur Brown has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REPLACEABLE UPPER CHAMBER PARTS OF PLASMA PROCESSING APPARATUS
    Publication number: 20110056626
    Abstract: An upper chamber section of a plasma reaction chamber includes a ceramic window with blind bores in an upper surface for receipt of a thermal couple and a resistance temperature detector, a top chamber interface which comprises an upper surface which vacuum seals against the bottom of the window and a gas injection system comprising 8 side injectors mounted in the sidewall of the top chamber interface and a gas delivery system comprising tubing which provides symmetric gas flow to the 8 injectors from a single gas feed connection.
    Type: Application
    Filed: September 10, 2010
    Publication date: March 10, 2011
    Applicant: Lam Research Corporation
    Inventors: Daniel Arthur Brown, Jeff A. Bogart, Ian J. Kenworthy