Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C.-950 C. which minimizes or alleviates the production of NOx.

Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C.-950° C. which minimizes or alleviates the production of NOx.

Abstract: The amount of particulate contamination produced due to rubbing between a semiconductor substrate and the robotic substrate handling blade has been greatly reduced by the use of specialized materials either as the principal material of construction for the semiconductor substrate handling blade, or as a coating upon the surface of the substrate handling blade. In particular, the specialized material must exhibit the desired stiffness at temperatures in excess of about 450° C.; the specialized material must also have an abrasion resistant surface which does not produce particulates when rubbed against the semiconductor substrate. The abrasion resistant surface needs to be very smooth, having a surface finish of less than 1.0 micro inch, and preferably less than 0.2 micro inch. In addition, the surface must be essentially void-free. In the most preferred embodiments, the upper, top surface of the substrate handling blade is constructed from a dielectric material being smooth, non-porous, and wear-resistant.

Abstract: The amount of particulate contamination produced due to rubbing between a semiconductor substrate and the robotic substrate handling blade has been greatly reduced by the use of specialized materials either as the principal material of construction for the semiconductor substrate handling blade, or as a coating upon the surface of the wafer handling blade. In particular, the specialized material must exhibit the desired stiffness at temperatures in excess of about 450.degree. C.; the specialized material must also have an abrasion resistant surface which does not produce particulates when rubbed against the semiconductor substrate. The abrasion resistant surface needs to be very smooth, having a surface finish of less than 1.0 micro inch, and preferably less than 0.2 micro inch. In addition, the surface must be essentially void-free. In the most preferred embodiments, the upper, top surface of the substrate handling blade is constructed from a dielectric material being smooth, non-porous, and wear-resistant.

Abstract: Hollow fiber membrane modules are manufactured by weaving hollow fiber membranes into a web while the fibers still contain a residual amount of the organic liquids used in the extrusion of the fibers. The web once formed is then passed through a final solvent extraction stage, followed by drying and heating to fix the final form and permeation characteristics of the membranes, and finally rolling the web into a bundle which forms the interior of the module. The hollow fibers are woven as fill in the web.

Abstract: In accordance with the present invention, a polishing pad useful for polishing a semiconductor-comprising substrate is disclosed. The polishing pad is constructed to include conduits which pass through at least a portion of and preferably through the entire thickness of the polishing pad. The conduits, preferably tubulars, are constructed from a first material which is different from a second material used as a support matrix. The conduits are positioned within the support matrix such that the longitudinal centerline of the conduit forms an angle ranging from about 60.degree. to about 120.degree. with the working surface of the polishing pad. One preferred method of fabrication the polishing pad is pultrusion, where the tubulars are pulled through a resin bath to apply a coating of resin and then through a series of dies in which the resin is cured to provide a support matrix around the tubulars.

Abstract: In accordance with the present invention, a polishing pad useful for polishing a semiconductor-comprising substrate is disclosed. The polishing pad is constructed to include conduits which pass through at least a portion of and preferably through the entire thickness of the polishing pad. The conduits, preferably tubulars, are constructed from a first material which is different from a second material used as a support matrix. The conduits are positioned within the support matrix such that the longitudinal centerline of the conduit forms an angle ranging from about 60.degree. to about 120.degree. with the working surface of the polishing pad.

Abstract: The present invention is a fluid separation module having improved permeate flow characteristics and improved space/volume requirements. Such modules comprise a hollow fiber bundle, a first and optional second tubesheet, an optional casing, a feed inlet, a permeate outlet, and a non-permeate outlet. The module is coiled, curved or bent into a useful non-linear shape which reduces the space requirements for the module essentially without diminishing the effectiveness of the fluid separation. The feed fluid is introduced to the module either in a boreside or a shellside manner. Coil, french horn, spiral or U-shaped configuration or combinations thereof are useful.

Abstract: This invention relates to improved semipermeable polycarbonate gas separation membranes containing substituted benzene(s), a method of using such membranes to separate gases, and a method of fabricating such membranes.

Abstract: The invention is a semi-permeable hollow fiber gas separation membrane possessing a non-external discriminating region fabricated from hydrophobic polymeric materials possessing less than about 1 weight percent equilibrium water content at about 25.degree. C. The invention includes a process for making such membranes as well as a method of using such membranes.

Abstract: This invention relates to a method of treating liquid-wet polycarbonate membranes to improve gas separation properties.

Abstract: The invention is a semi-permeable membrane which comprises a polymeric matrix with two porous surfaces and a region which functions to separate one or more gases from one or more other gases.The membranes of this invention exhibit excellent separation factors and flux. Such membranes are less prone to being damaged due to handling and exposure to contaminants due to the internal region which affects the separation, as the porous surfaces function to protect such region.

Abstract: The invention is a process for the preparation of a POWADIR membrane comprising bisphenol-based polycarbonates wherein at least 25 percent by weight of the bisphenol moieties are tetrahalogenated wherein the halogen is Cl or Br, and the membrane prepared by such process.

Abstract: Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.

Abstract: Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.

Abstract: Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.