Patents by Inventor Daniel P. Stambaugh

Daniel P. Stambaugh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9953927
    Abstract: Structures for a liner replacement in an interconnect structure and methods for forming a liner replacement in an interconnect structure. A metallization level is formed that includes a conductive feature. A dielectric layer is formed on the metallization level. The dielectric layer includes an opening that extends vertically through the dielectric layer to the conductive feature. An adhesion layer is formed on area of the conductive feature exposed at a base of the opening. The adhesion layer has a thickness equal to a monolayer or a fraction of a monolayer. Another layer (e.g., barrier layer) of a different composition (e.g., TiN) may be deposited on the adhesion layer before the opening is filled with metal deposited by chemical vapor deposition.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: April 24, 2018
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Yun-Yu Wang, Daniel P. Stambaugh, Jeffrey Brown, Keith Kwong Hon Wong
  • Publication number: 20150111374
    Abstract: Embodiments of present invention provide a method of forming semiconductor devices. The method includes creating an opening in a semiconductor structure; depositing a first layer of metal inside the opening with the first layer of metal partially filling up the opening; modifying a top surface of the first layer of metal in an etching process; passivating the modified top surface of the first layer of metal to form a passivation layer; and depositing a second layer of metal directly on top of the passivation layer.
    Type: Application
    Filed: October 18, 2013
    Publication date: April 23, 2015
    Applicant: International Business Machines Corporation
    Inventors: Ruqiang Bao, Domingo A. Ferrer, Filippos Papadatos, Daniel P. Stambaugh
  • Patent number: 3951555
    Abstract: A writing pen which comprises a vacuum controlled reservoir for containing a supply of ink having a lower viscosity than conventional ball pen ink, a writing tip which may be any one of a number of interchangeable types and a finned collector including a weir and feed which are arranged to induce capillary flow of the ink from the reservoir to the tip for writing purposes.
    Type: Grant
    Filed: April 14, 1975
    Date of Patent: April 20, 1976
    Assignee: The Parker Pen Company
    Inventors: Frederick R. Wittnebert, Francis J. Meinhardt, Joseph R. Branks, Gerald C. Herold, Daniel P. Stambaugh