Patents by Inventor Daniel Paul Greenbank

Daniel Paul Greenbank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6966967
    Abstract: A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
    Type: Grant
    Filed: March 26, 2003
    Date of Patent: November 22, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Patent number: 6739840
    Abstract: Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
    Type: Grant
    Filed: May 22, 2002
    Date of Patent: May 25, 2004
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Publication number: 20040013531
    Abstract: A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
    Type: Application
    Filed: March 26, 2003
    Publication date: January 22, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu
  • Publication number: 20030219342
    Abstract: Method, article of manufacture and apparatus for monitoring operating characteristics of a system comprising a variable speed vacuum pump. Operating characteristics reflective of gas load on the pump are observed for behavior indicating a change in the gas load. In one embodiment, the operating characteristic is the current in a power signal being provided to the pump.
    Type: Application
    Filed: May 22, 2002
    Publication date: November 27, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Mark William Curry, Daniel Paul Greenbank, Danny Cam Toan Lu