Abstract: A device for MR/VR systems that includes a two-dimensional array of cameras that capture images of respective portions of a scene. The cameras are positioned along a spherical surface so that the cameras have adjacent fields of view. The entrance pupils of the cameras are positioned at or near the user's eye while the cameras also form optimized images at the sensor. Methods for reducing the number of cameras in an array, as well as methods for reducing the number of pixels read from the array and processed by the pipeline, are also described.

Abstract: A device for MR/VR systems that includes a two-dimensional array of cameras that capture images of respective portions of a scene. The cameras are positioned along a spherical surface so that the cameras have adjacent fields of view. The entrance pupils of the cameras are positioned at or near the user’s eye while the cameras also form optimized images at the sensor. Methods for reducing the number of cameras in an array, as well as methods for reducing the number of pixels read from the array and processed by the pipeline, are also described.

Abstract: A device for MR/VR systems that includes a two-dimensional array of cameras that capture images of respective portions of a scene. The cameras are positioned along a spherical surface so that the cameras have adjacent fields of view. The entrance pupils of the cameras are positioned at or near the user's eye while the cameras also form optimized images at the sensor. Methods for reducing the number of cameras in an array, as well as methods for reducing the number of pixels read from the array and processed by the pipeline, are also described.

Abstract: A device for MR/VR systems that includes a two-dimensional array of cameras that capture images of respective portions of a scene. The cameras are positioned along a spherical surface so that the cameras have adjacent fields of view. The entrance pupils of the cameras are positioned at or near the user's eye while the cameras also form optimized images at the sensor. Methods for reducing the number of cameras in an array, as well as methods for reducing the number of pixels read from the array and processed by the pipeline, are also described.

Abstract: A scene camera system that includes two or more mirrors that reflect light from a respective portion of a field of view (FOV) in front of the system and two or more cameras that each capture the light reflected by a respective one of the two or more mirrors. By using the mirrors to reflect the light, the cameras' entrance pupils are imaged to a location closer to a user's eyes to thus achieve a more accurate representation of the perspective of the user.

Abstract: A scene camera system that includes two or more mirrors that reflect light from a respective portion of a field of view (FOV) in front of the system and two or more cameras that each capture the light reflected by a respective one of the two or more mirrors. By using the mirrors to reflect the light, the cameras' entrance pupils are imaged to a location closer to a user's eyes to thus achieve a more accurate representation of the perspective of the user.

Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.

Abstract: Methods and systems for performing single wavelength ellipsometry (SWE) measurements with reduced measurement spot size are presented herein. In one aspect, a pupil stop is located at or near a pupil plane in the collection optical path to reduce sensitivity to target edge diffraction effects. In another aspect, a field stop is located at or near an image plane conjugate to the wafer plane in the collection optical path to reduce sensitivity to undesired optical-structural interactions. In another aspect, a linear polarizer acting on the input beam of the SWE system includes a thin, nanoparticle based polarizer element. The nanoparticle based polarizer element improves illumination beam quality and reduces astigmatism on the wafer plane. The pupil and field stops filter out unwanted light rays before reaching the detector. As a result, measurement spot size is reduced and tool-to-tool matching performance for small measurement targets is greatly enhanced.

Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.