Abstract: An interconnect structure and a method to form an interconnect structure utilizes a high-aspect ratio single-damascene line and a non-damascene via. The interconnect includes a first single-damascene interconnect line disposed in a first interlayer dielectric layer, and a non-damascene via on the first single-damascene interconnect line that may be formed from cobalt, titanium and/or tungsten. A first SiCN layer may be formed on one or more sidewalls of the non-damascene via. A second single-damascene layer may be formed on the non-damascene via in which the second single-damascene layer may be disposed in a second interlayer dielectric layer. A second SiCN layer may be formed on at least part of an upper surface of the first single-damascene layer, and a third SiCN layer may be formed on at least part of an upper surface of the second single-damascene layer.

Abstract: An interconnect structure and a method to form an interconnect structure utilizes a high-aspect ratio single-damascene line and a non-damascene via. The interconnect includes a first single-damascene interconnect line disposed in a first interlayer dielectric layer, and a non-damascene via on the first single-damascene interconnect line that may be formed from cobalt, titanium and/or tungsten. A first SiCN layer may be formed on one or more sidewalls of the non-damascene via. A second single-damascene layer may be formed on the non-damascene via in which the second single-damascene layer may be disposed in a second interlayer dielectric layer. A second SiCN layer may be formed on at least part of an upper surface of the first single-damascene layer, and a third SiCN layer may be formed on at least part of an upper surface of the second single-damascene layer.

Abstract: A dynamic gain equalizer-monitor (DGEM) includes a light modulator operable to modulate one or more component wavelengths of an input optical signal. The DGEM also includes a grating operable to receive one or more modulated component wavelengths from the light modulator. The grating is also operable to combine a first portion of each of the one or more modulated component wavelengths and transmit that first portion into an output optical signal. The DGEM may also include a detector array operable to receive, from the grating, a second portion of modulated component wavelengths that are separated from the first portion by the grating. The detector array is operable to generate an electrical signal proportional to an optical characteristic associated with each of the modulated component wavelengths of the second portion.

Abstract: One embodiment of an improved method for removing a post from the ground, the method including inserting a spike tool into the ground around the perimeter of the base of the post, reducing the lifting force required by creating a layer of reduced friction mud surrounding the base of the post, supplying of pressurized fluid through the spike tool to the base of the post within the ground, and neutralizing the suction force created when the post is lifted from the ground.

Abstract: A system and method for packaging multiple MEMS devices is disclosed. A preferred embodiment comprises two or more MEMS devices, such as DMD devices, packaged together into a single package. The MEMS devices can be either on a single substrate or else on multiple substrates, and may be aligned together or not aligned together depending upon the desired orientation of the MEMS devices.

Abstract: A method for haze control on a semiconductor reticle, the method including performing a reticle inspection of a semiconductor reticle to detect haze formation on a periodic basis, performing a wafer inspection to detect haze defects, forecasting haze formation, and cleaning the semiconductor reticle. Also included is a haze forecasting method for haze control on a semiconductor reticle, including scanning a plurality of semiconductor wafers, identifying repeating defects in the semiconductor wafers, storing the repeating defects in a database as known repeating defects, and identifying an additional repeating defect that is not a known repeating defect, the additional repeating defect caused by semiconductor reticle haze.

Abstract: A system and method for the modulation of light propagating along an optical path, for example the optical path in a projection display system. As light in the optical path travels from a light source to a display screen, it is shaped and modulated by the various components of the optical path so that the intended visual image appears on the display screen. In accordance with the present invention, a mirror disposed proximate the optical path is operable to be selectively inserted and removed from the optical path to alternately direct the light from one portion of the optical path to another, or to a light dump where it can be absorbed such that the associated heat energy may be properly dissipated. In a preferred embodiment, the mirror is a fold mirror mounted at a stop of the system to fold the light beam approximately 90 degrees when the mirror is inserted in the optical path.

Abstract: A multi-layered sports playing field including a top layer made of substantially artificial material simulating a natural playing surface such as grass and a padding layer positioned between the top layer and the base or dirt layer. The padding layer is made of a plurality of discrete beads of substantially elastic, resilient material (e.g., foam) with portions of adjacent beads abutting one another and other portions being spaced from each other. Substantially all of the adjacent beads are preferably integrally joined (e.g., glued, fused) together at their abutting portions. The padding layer is very porous and breathable and preferably includes feet members supporting the main body of the padding layer above the base or dirt layer to create a water channel of interconnected portions to enhance water drainage to the sides of the field.

Abstract: A method for haze control on a semiconductor reticle, the method including performing a reticle inspection of a semiconductor reticle to detect haze formation on a periodic basis, performing a wafer inspection to detect haze defects, forecasting haze formation, and cleaning the semiconductor reticle. Also included is a haze forecasting method for haze control on a semiconductor reticle, including scanning a plurality of semiconductor wafers, identifying repeating defects in the semiconductor wafers, storing the repeating defects in a database as known repeating defects, and identifying an additional repeating defect that is not a known repeating defect, the additional repeating defect caused by semiconductor reticle haze.

Abstract: A multi-layered sports playing field including a top layer made of substantially artificial material simulating a natural playing surface such as grass and a padding layer positioned between the top layer and the base or dirt layer. The padding layer is made of a plurality of discrete beads of substantially elastic, resilient material (e.g., foam) with portions of adjacent beads abutting one another and other portions being spaced from each other. Substantially all of the adjacent beads are preferably integrally joined (e.g., glued, fused) together at their abutting portions. The padding layer is very porous and breathable and preferably includes feet members supporting the main body of the padding layer above the base or dirt layer to create a water channel of interconnected portions to enhance water drainage to the sides of the field.

Abstract: A dynamic gain equalizer-monitor (DGEM) includes a light modulator operable to modulate one or more component wavelengths of an input optical signal. The DGEM also includes a grating operable to receive one or more modulated component wavelengths from the light modulator. The grating is also operable to combine a first portion of each of the one or more modulated component wavelengths and transmit that first portion into an output optical signal. The DGEM may also include a detector array operable to receive, from the grating, a second portion of modulated component wavelengths that are separated from the first portion by the grating. The detector array is operable to generate an electrical signal proportional to an optical characteristic associated with each of the modulated component wavelengths of the second portion.