Patents by Inventor Daniel Stephan Brown

Daniel Stephan Brown has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100192773
    Abstract: Embodiments of an abatement apparatus are disclosed herein. In some embodiments, an abatement apparatus may include a scrubber configured to receive an effluent stream from a process chamber and further configured to remove first particles from the effluent stream; a scrubber conduit coupled to the scrubber to receive the effluent stream therefrom and configured to remove second particles from the effluent stream, the scrubber conduit having one or more inlets configured to provide a fluid to sufficiently wet an interior surface of the scrubber conduit to trap the second particles thereon and to wash the second particles therealong; and a central scrubber coupled to the scrubber via the scrubber conduit. In some embodiments, the scrubber conduit is downward sloping from the scrubber to the central scrubber. In some embodiments, a plurality of scrubbers may be coupled to the central scrubber via a plurality of scrubber conduits.
    Type: Application
    Filed: January 29, 2010
    Publication date: August 5, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Daniel O. Clark, Colin John Dickinson, Jay J. Jung, Daniel Stephan Brown, Mehran Moalem, Frank F. Hooshdaran, Morteza Farnia, Barry Page, Gary Sypherd, Jonathan Dahm, Phil Chandler