Patents by Inventor Darrel M. Harris

Darrel M. Harris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiant polishing block heater
    Patent number: 5906533
    Abstract: A method for mounting a semiconductor wafer on a polishing block to hold the semiconductor wafer during polishing. The method comprises the steps of providing a polishing block having a surface for mounting the semiconductor wafer, coating the polishing block surface with a bonding agent, applying radiant heat to the polishing block and bonding agent to soften the bonding agent, and applying the semiconductor wafer to the softened bonding agent. The step of applying radiant heat to the polishing block and bonding agent is performed by a radiant heater in a dry environment.
    Type: Grant
    Filed: October 15, 1997
    Date of Patent: May 25, 1999
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Darrel M. Harris, Harold E. Hall, Jr.