Abstract: Methods, systems, and computer programs are presented for predicting the performance of semiconductor manufacturing equipment operations. One method includes an operation for obtaining machine-learning (ML) models, each model related to predicting a performance metric for an operation of a semiconductor manufacturing tool. Further, each ML model utilizes features defining inputs for the ML model. The method further includes an operation for receiving a process definition for manufacturing a product with the semiconductor manufacturing tool. One or more ML models are utilized to estimate a performance of the process definition used in the semiconductor manufacturing tool. Additionally, the method includes presenting, on a display, results showing the estimate of the performance of the manufacturing of the product.

Abstract: A tarpaulin apparatus and method for covering comprising a surface sheet having a plurality of sectioned pockets positioned at the corners of the tarpaulin apparatus. Each of the pockets are sized and adapted to accommodate weights that weigh down the tarpaulin and maintain its position when utilized to cover an object or pile. Each of the pockets have an interior and an opening that is secured by a set of hook and loop fasteners to help keep the weights within the sectioned pocket when the tarpaulin is in use. Also positioned at the edges of the surface sheet are a plurality of grommets through which the tarpaulin apparatus may be further secured with rope, twine, wire or other conventional form of line.

Abstract: An azimuthal mixer component that may be plumbed in-line with a showerhead stem tube of a semiconductor processing apparatus is provided. The azimuthal mixer may include a main passage that is coaxial with the stem tube, and one or more plenums that partially or wholly encircle the main passage. Corresponding sets of radial passages may fluidically connect the main passage with each of the plenums.

Abstract: An apparatus for use in semiconductor processing operations to distribute process gases across a semiconductor wafer. The apparatus may include one or more annular baffles arranged in a stack of annular baffle layers within a plenum volume of the apparatus. Each annular baffle may have a mid-diameter substantially equal to and inner diameter or outer diameter of a baffle in the annular baffle layer above it. The annular baffles may be arranged in a cascading fashion.

Abstract: An azimuthal mixer component that may be plumbed in-line with a showerhead stem tube of a semiconductor processing apparatus is provided. The azimuthal mixer may include a main passage that is coaxial with the stem tube, and one or more plenums that partially or wholly encircle the main passage. Corresponding sets of radial passages may fluidically connect the main passage with each of the plenums.

Abstract: An apparatus for use in semiconductor processing operations to distribute process gases across a semiconductor wafer. The apparatus may include one or more annular baffles arranged in a stack of annular baffle layers within a plenum volume of the apparatus. Each annular baffle may have a mid-diameter substantially equal to and inner diameter or outer diameter of a baffle in the annular baffle layer above it. The annular baffles may be arranged in a cascading fashion.

Abstract: A computer-implemented method of recording the times of events related to the medical care delivered to patient, and for integrating those times to provide a patient history, including recording a first time of occurrence of a first event, recording first clock information characterizing a first time source from which the first time of occurrence was obtained, recording a second time of occurrence of a second event, recording second clock information characterizing a second time source from which the second time of occurrence was obtained, wherein the first time source and the second time source are independent of one another and not synchronized with one another, transferring recorded data so that the first time of occurrence, first clock information, second time of occurrence, and second clock information are accessible at a computer; and producing a patient history using at least the first and second times of occurrence.

Abstract: The invention provides an improved surface safe, aqueous, liquid hard surface cleaner which contains a nonionic surfactant, or combination of nonionic and anionic surfactants, a water soluble abrasive, namely, borax pentahydrate, in an amount which takes at least a portion of the abrasive out of solution, and water.