Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

Abstract: A system and method of context-sensitive, location-based information delivery at a construction site senses the identity and current location of each user, and accesses a variety of databases. Based on a user's identity, the status of various tasks associated with the user, and the user's location, the system intelligently accesses only the information that the user needs at his current location at the current time. The system automatically, wirelessly transmits the information to the user, in the most useful format. The system may additionally observe and track the movement of personnel, equipment, and building materials on the construction site, leading to increased productivity through more effective management. The system may also enforce location-based safety codes.