Patents by Inventor David James Lischka

David James Lischka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Load cup substrate sensing
    Patent number: 8734202
    Abstract: Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: May 27, 2014
    Assignee: Applied Materials, Inc.
    Inventors: David James Lischka, Thomas Lawrence Terry
  • LOAD CUP SUBSTRATE SENSING
    Publication number: 20130260646
    Abstract: Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
    Type: Application
    Filed: May 21, 2013
    Publication date: October 3, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: David James LISCHKA, Thomas Lawrence TERRY
  • Load cup substrate sensing
    Patent number: 8454408
    Abstract: Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: June 4, 2013
    Assignee: Applied Materials, Inc.
    Inventors: David James Lischka, Thomas Lawrence Terry
  • LOAD CUP SUBSTRATE SENSING
    Publication number: 20100130102
    Abstract: Embodiments of the present invention generally provide a load cup used in the transfer of substrates in a chemical mechanical polishing system. The load cup includes an improved substrate edge sensing mechanism to ensure a substrate is present and correctly positioned in the load cup for transfer to a polishing head. In one embodiment, a lever actuated edge sensing mechanism is provided. In one embodiment, the edge of a substrate contacts a lever, which contacts a sensor to detect that the substrate is present and correctly positioned for exchange with a polishing head. Embodiments of the present invention provide reliable detection, while reducing contact with the feature side of the substrate during substrate transfer.
    Type: Application
    Filed: November 19, 2009
    Publication date: May 27, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: David James Lischka, Thomas Lawrence Terry