Patents by Inventor David L. Halbmeier

David L. Halbmeier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Purge system for a substrate container
    Patent number: 8146623
    Abstract: A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: April 3, 2012
    Assignee: Entegris, Inc.
    Inventors: Anthony Mathius Tieben, David L. Halbmeier, Steven P. Kolbow