Abstract: The present invention is a method and apparatus for CMP processing that reduces scratching of the insulating film and conductor lines of a wafer. More specifically, the method and apparatus introduce an aqueous solution to the polishing pad and wafer during various intervals of the polishing procedure.

Abstract: An apparatus for and method of detecting the presence of a brush used in a semiconductor wafer cleaner for post-CMP processing is described. Semiconductor wafers are loaded into the wet environment of the wafer cleaner, affixed to a rotatable fixture and rotated at high speed. The rotatable fixture is effectuated by a servo motor linked to a servo controller and a torque monitor. A first torque on the rotating wafer is calculated prior to the start of the brush cleaning cycle. During the brush cleaning cycle, as the brush within the brush cleaner contacts the rotating wafer, the torque on the wafer increases and a second torque is calculated. If, during the brush cleaning cycle, the second torque calculation is substantially equal to the first torque calculation, the brush cleaner is not contacting the wafer and cleaning has not progressed. A tool user can be notified to reaffix the brush within the cleaner.

Abstract: A voice portal platform for communicating content to a telephone user during a telephone call includes a manager for receiving and executing voice application logic of voice applications and for providing a telephone user session having a voice application for the telephone user during the telephone call. A telephony channel provides telephony event signals between the telephone user and the voice application indicative of telephony events. A speech channel provides speech event signals to the voice application and the telephone user in response to speech events from the telephone user and the voice application. A content server provides content event signals by accessing requested content from content sources. The manager maps the voice application logic of the voice application to the telephony channel, the speech channel, and the content server for execution of the voice application logic to generate the event signals during the telephone call.

Abstract: A communication system for communicating information to a telephone user in response to a request for the information from the telephone user. The communication system includes a text data source having text documents. A voice application receives a request from the telephone user for information and then retrieves a text document related to the requested information from the text data source. A context detector determines the context of the text document. A text cleaner modifies the text document as a function of a context of the text document. A text-to-speech (TTS) converter converts the modified text document into speech. The TTS converter provides the speech to the telephone user via the voice application in order to satisfy the request for information from the telephone user.

Abstract: A communication system for communicating content to a telephone user in response to a request for the content from the telephone user. The system includes a voice application operable for receiving a request from the telephone user for content and for generating a content request indicative of the content requested by the telephone user. A first consent provider is operable for periodically generating pushed content files and a second content provider is operable for generating on-demand content files. In response to receiving a content request from the voice application a content server is operable for providing content handlers having audio versions of pushed and on-demand content files related to the content requested by the telephone user from the content providers to the voice application. The voice application then plays the audio versions of the content files related to the content requested by the telephone user to the telephone user.

Abstract: A method and system for communicating information to a telephony user in response to a request for the information from the telephony user includes a text data source having text documents and a voice application operable with the text data source for retrieving a text document related to the requested information. A text-to-speech (TTS) manager divides the text document into text document segments. TTS engines convert the text document segments into speech segments. Each text document segment is converted into a speech segment by one TTS engine. A buffer reassembles the speech segments in the proper order and then delivers the speech segments to the user. The TTS manager divides the text document as a function of the rate at which speech segments are delivered to the user such that the speech segments are delivered from the TTS engines to the buffer and from the buffer to the user continuously.

Abstract: A polishing apparatus for polishing a substrate. The polishing apparatus has a slurry delivery system for delivering slurry to the apparatus; a porous polishing pad having an upper surface at which the substrate is polished; and a rotating platen upon which the porous pad lies. The rotating platen has a recess which has a first portion in communication with the delivery means for delivering slurry into the first portion. The recess further has a second portion extending under the polishing pad. Slurry is delivered from the first portion to the second portion and to the upper surface of the pad where it aids in the polishing of the substrate. Preferably, the first portion of the recess is situated such that the slurry delivered to the top surface returns to the first portion for removal or reuse due to the rotational force of the rotating platen.

Abstract: A polishing apparatus for polishing a substrate. The polishing apparatus has a slurry delivery system for delivering slurry to the apparatus; a porous polishing pad having an upper surface at which the substrate is polished; and a rotating platen upon which the porous pad lies. The rotating platen has a recess which has a first portion in communication with the delivery means for delivering slurry into the first portion. The recess further has a second portion extending under the polishing pad. Slurry is delivered from the first portion to the second portion and to the upper surface of the pad where it aids in the polishing of the substrate. Preferably, the first portion of the recess is situated such that the slurry delivered to the top surface returns to the first portion for removal or reuse due to the rotational force of the rotating platen.

Abstract: A harvester (10) includes a separator (22) to help separate unwanted plant material from a crop. Separator (22) includes a series of paddles (46) which are rotated in unison by a drive system (50). The crop, which will often comprise a vine or tree crop, and which will ideally comprise raisins (14), falls between rotating paddles (46). Plant materials, such as cane (60), is transported by the tops of the rotating paddles from over cane separator (22).