Abstract: An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.

Abstract: An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.

Abstract: An electric motor having optimum torque, comprising a motor having a shaft, a rotor and stator, permanent magnets generating flux and current in windings generating additional flux. A control circuit generates a velocity signal proportional to shaft velocity and a current signal proportional to the current in the windings. The current signal is multiplied by the velocity signal to produce an input signal. The input signal is fed to the motor to thereby adjust the phase angle of the current so that the angle between the flux from the current and the flux from the permanent magnet are 90.degree. apart.